Granted Patent
Utility
US 6,638,141
· Confirmation No. 3595
METHOD AND APPARATUS FOR CHEMICAL-MECHANICAL POLISHING
Inventor:
Shigeaki Ide
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-08 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-08-08 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-07-05 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-07-05 | SPEC |
Specification | 23 | View | |
| 2002-07-05 | CLM |
Claims | 4 | View | |
| 2002-07-05 | ABST |
Abstract | 1 | View | |
| 2002-07-05 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-07-05 | OATH |
Oath or Declaration filed | 1 | View |
Inventors
Shigeaki Ide
Kumamoto, JAPAN
Attorneys & Agents of Record
Classification
USPC
451/7
B24B37/30
B24B37/013
B24B49/14
Prosecution
- Examiner
- MCDONALD, SHANTESE L
- Art Unit
- 3723
- Customer No.
- 26304
- Docket No.
- NECA 19.824
- Confirmation No.
- 3595
Foreign Priority
206939/2001
·
2001-07-06
·
JAPAN
Publication
- Pub. No.
- US20030008600A1
- Pub. Date
- 2003-01-09
Patent Term Adjustment
0days
No related applications found.
CHANGE OF ADDRESS
Recorded 2017-11-29
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-19
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Quick Facts
- Patent No.
- US 6,638,141
- App. No.
- 10/190,016
- Filed
- 2002-07-05
- Granted
- 2003-10-28
- Pub. No.
- US20030008600A1
- Examiner
- MCDONALD, SHANTESE L
- Art Unit
- 3723
- PTA
- 0 days
External Links