Patent Assignment
Reel/Frame 013095/0808
Assignment of Assignor's Interest
Recorded: 2002-07-08
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
MINATO-KU, 3-6, AKASAKA 5-CHOME, TOKYO 107, JAPAN
Covered Property
(1)
Segmented Electrode Apparatus and Method for Plasma Processing