Patent Assignment
Reel/Frame 013098/0464
Assignment of Assignor's Interest
Recorded: 2002-07-11
Pages: 3
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Washing a Semiconductor Wafer
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.