Patent Assignment
Reel/Frame 013099/0883
Assignment of Assignor's Interest
Recorded: 2002-07-10
Pages: 3
Assignors
CHUNG, HUA
Executed: 2002-07-10
CHEN, LING
Executed: 2002-07-10
KU, VINCENT W.
Executed: 2002-07-10
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method of Film Deposition Using Activated Precursor Gases