Patent Assignment
Reel/Frame 013102/0920
Assignment of Assignor's Interest
Recorded: 2002-07-15
Pages: 3
Assignors
TAKAYAMA, TORU
Executed: 2002-07-08
MARUYAMA, JUNYA
Executed: 2002-07-08
MIZUKAMI, MAYUMI
Executed: 2002-07-04
YAMAZAKI, SHUNPEI
Executed: 2002-07-07
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0, JAPAN
Covered Property
(1)
Semiconductor Device and Peeling Off Method and Method of Manufacturing Semiconductor Device