Patent Assignment
Reel/Frame 013115/0824
Assignment of Assignor's Interest
Recorded: 2002-07-16
Pages: 3
Assignor
KIENZLE, OLIVER
Executed: 2002-05-07
Assignee
CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-734, GERMANY
Covered Property
(1)
Particle-Optical Apparatus, Illumination Apparatus and Projection System as Well as a Method Employing the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.