Patent Assignment
Reel/Frame 013126/0447
Assignment of Assignor's Interest
Recorded: 2002-09-26
Pages: 25
Assignors
SHAMOUILIAN, SHAMOUIL
Executed: 2002-09-11
LAI, CANFENG
Executed: 2002-08-21
COX, MICHAEL SANTIAGO
Executed: 2002-08-16
KRISHNARAJ, PADMANABHAN
Executed: 2002-08-16
TANAKA, TSUTOMU
Executed: 2002-09-20
RAOUX, SEBASTIEN
Executed: 2002-08-19
PORSHNEV, PETER I.
Executed: 2002-08-16
NOWAK, THOMAS
Executed: 2002-08-19
Assignee
APPLIED MATERIALS, INC.
PATENT DEPARTMENT, P.O. BOX 450A, M/S #2061, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Semiconductor Device Fabrication Chamber Cleaning Method and Apparatus with Recirculation of Cleaning Gas