Patent Assignment
Reel/Frame 013129/0415
Assignment of Assignor's Interest
Recorded: 2002-07-30
Pages: 2
Assignor
DRAKE, THOMAS E., JR.
Executed: 2002-07-20
Assignee
LOCKHEED MARTIN CORPORATION
6801 ROCKLEDGE DRIVE, BETHESDA, MARYLAND, 20817
Covered Property
(1)
System and Method for Controlling Wafer Temperature