Patent Assignment
Reel/Frame 013139/0485
Assignment of Assignor's Interest
Recorded: 2001-10-09
Received: 2002-09-30
Pages: 3
Assignee
KOMATSU LTD.
MINATO-KU,, 3-6, AKASAKA 2-CHOME,, TOKYO 107-8414,, JPX, JAPAN
Covered Properties
(2)
Method of Producing Polycrystalline Silicon for Semiconductors from Silane Gas
Application:
09/971,801 →
Cloverleaf microgyroscope with electrostatic alignment and tuning
Application:
09/927,858 →