Patent Assignment
Reel/Frame 013141/0154
Assignment of Assignor's Interest
Recorded: 2002-07-30
Pages: 2
Assignor
SCHUSTER, KARL-HEINZ
Executed: 2002-07-10
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, 73447, OBERKOCHEN, GERMANY
Covered Property
(1)
Polarizer and Microlithography Projection System with a Polarizer
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.