Patent Assignment
Reel/Frame 013164/0929
Assignment of Assignor's Interest
Recorded: 2002-07-31
Pages: 2
Assignor
IKEDA, FUMIHIDE
Executed: 2002-07-25
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO 164-8511, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Semiconductor Device Producing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.