Patent Assignment
Reel/Frame 013171/0043
Assignment of Assignor's Interest
Recorded: 2002-08-05
Pages: 2
Assignor
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2002-07-22
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Substrate Provided with an Alignment Mark in a Substantially Transmissive Process Layer, Mask for Exposing Said Mark, Device Manufacturing Method, and Device Manufactured Thereby