Patent Assignment
Reel/Frame 013196/0120
Assignment of Assignor's Interest
Recorded: 2002-10-24
Pages: 2
Assignor
MALINOWSKI, MICHAEL E.
Executed: 2002-10-11
Assignee
EUV LLC
2200 MISSION COLLEGE BLVD., MS SCI-02, SANTA CLARA, CALIFORNIA, 95052-8119
Covered Property
(1)
Method and Apparatus for Detecting the Presence and Thickness of Carbon and Oxide Layers on Euv Reflective Surfaces
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.