Patent Assignment
Reel/Frame 015214/0827
Confirmatory License
Recorded: 2004-10-05
Pages: 3
Assignor
SANDIA NATIONAL LABORATORIES
Executed: 2002-10-17
Assignee
ENERGY, U.S. DEPARTMENT OF
1000 INDEPENDENCE AVENUE, S.W., WASHINGTON, DISTRICT OF COLUMBIA, 20585-0162
Covered Property
(1)
Method and Apparatus for Detecting the Presence and Thickness of Carbon and Oxide Layers on Euv Reflective Surfaces
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.