Patent Assignment
Reel/Frame 013198/0738
Assignment of Assignor's Interest
Recorded: 2002-08-13
Pages: 10
Assignors
KUMAR, ATUL
Executed: 2002-04-27
CHANG, JAMES YU CHUNG
Executed: 2002-04-27
NGUYEN, BINH
Executed: 2002-04-29
LEE, CHUNG J.
Executed: 2002-04-27
NGUYEN, OANH
Executed: 2002-04-27
LEE, WEI SHIANG CHARLES
Executed: 2002-04-27
SOLOMENSKY, MICHAEL
Executed: 2002-04-27
Assignee
DIELECTRIC SYSTEMS, INC.
45500 NORTHPORT LOOP WEST, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Process modules for transport polymerization of low epsilon thin films
Application:
10/126,919 →
Publication:
US 2003/0196680