Patent Assignment
Reel/Frame 013200/0591
Assignment of Assignor's Interest
Recorded: 2002-08-15
Pages: 2
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.