Patent Assignment
Reel/Frame 013217/0987
Assignment of Assignor's Interest
Recorded: 2002-08-14
Pages: 5
Assignors
HENKE, AXEL
Executed: 2002-07-12
WEGE, STEPHAN
Executed: 2002-08-07
GREWAL, VIRINDER
Executed: 2002-07-09
Assignee
INFINEON TECHNOLOGIES AG
ST.-MARTIN-STR. 53, 81669 MUNCHEN, GERMANY
Covered Property
(1)
Method for Etching High-Aspect-Ratio Features
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.