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Patent Assignment
Reel/Frame 013222/0522

Assignment of Assignor's Interest

Recorded: 2002-08-26 Received: 2002-08-29 Pages: 3
Assignors
CHAPMAN, RICHARD
Executed: 2002-08-01
ODOR, CATHERINE
Executed: 2002-08-01
Assignee
INFINEON TECHNOLOGIES RICHMOND, LP
6000 TECHNOLOGY BOULEVARD, SANDSTON, VA, 23150, UNITED STATES
Covered Property (1)
System and Method for Enhanced Monitoring of an Etch Process
Application: 10/102,546 →