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App. No. 10/102,546 · Confirmation No. 7340

SYSTEM AND METHOD FOR ENHANCED MONITORING OF AN ETCH PROCESS

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2002-03-20 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
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2002-03-20 FWCLM Index of Claims 1 View
2002-03-20 TRNA Transmittal of New Application 1 View
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Quick Facts
App. No.
10/102,546
Filed
2002-03-20
Granted
2004-12-07
Pub. No.
US20030178390A1
Art Unit
1763
PTA
-241 days