Patent Assignment
Reel/Frame 013235/0560
Assignment of Assignor's Interest
Recorded: 2002-08-23
Pages: 3
Assignors
PARK, SUNG-JIN
Executed: 2002-08-21
RYU, CHAN-HO
Executed: 2002-08-21
NANOMETRICS KOREA LIMTIED
Executed: 2002-08-21
Assignee
LNANOMETRICS INCORPORATED
1550 BUCKEYE DRIVE, MILPITAS, CALIFORNIA, 95035-7418
Covered Property
(1)
Method and Apparatus for Inspecting Defects on Polishing Pads to Be Used with Chemical Mechanical Polishing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.