Patent Assignment
Reel/Frame 013236/0398
Assignment of Assignor's Interest
Recorded: 2002-08-26
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device