Assignment of Assignor's Interest

Recorded: 2002-08-23 Pages: 2

Assignors

KIDO, SHUSAKU

Executed: 2002-08-16

IIO, YOSHIHIDE

Executed: 2002-08-16

IKEDA, MASAKI

Executed: 2002-08-16

Assignee

NEC CORPORATION

7-1 SHIBA 5 CHOME MINATO-KU, TOKYO, JAPAN

Covered Property (1)

Substrate processing system for performing exposure process in gas atmosphere

Application: 10/226,961 →

Publication: US 2003/0041971

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.