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App. No. 10/226,961 · Confirmation No. 6469

Substrate processing system for performing exposure process in gas atmosphere

Abandoned -- After Examiner's Answer or Board of Appeals Decision View Publication ↗
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2011-03-18 ABN Abandonment 2 View
2011-02-14 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-02-14 TRAN.LET Transmittal Letter 2 View
2010-12-20 APDA Patent Board Decision - Examiner Affirmed 10 View
2009-10-19 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-10-19 TRAN.LET Transmittal Letter 2 View
2009-05-15 AP_DK_M Appeal Docketing Notice 3 View
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2009-05-04 TRAN.LET Transmittal Letter 2 View
2009-04-29 RBNE Reply Brief Noted - Patent Board 2 View
2009-02-02 APRB Reply Brief Filed 23 View
2008-12-08 APEA Examiner's Answer to Appeal Brief 34 View
2008-09-02 AP.B Appeal Brief Filed 42 View
2008-09-02 XT/ Extension of Time 2 View
2008-06-18 N/AP Notice of Appeal Filed 2 View
2008-04-30 CTFR Final Rejection 23 View
2008-01-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2008-01-28 CLM Claims 7 View
2008-01-28 REM Applicant Arguments/Remarks Made in an Amendment 20 View
2008-01-28 WFEE Fee Worksheet (SB06) 1 View
2007-11-05 CTNF Non-Final Rejection 23 View
2007-11-05 892 List of references cited by examiner 1 View
2007-11-05 SRFW Search information including classification, databases and other search related notes 1 View
2007-11-02 SRNT Examiner's search strategy and results 3 View
2007-10-09 A.NE Response After Final Action 2 View
2007-10-09 CLM Claims 7 View
2007-10-09 REM Applicant Arguments/Remarks Made in an Amendment 19 View
2007-10-09 FRPR Certified Copy of Foreign Priority Application 70 View
2007-10-09 WFEE Fee Worksheet (SB06) 1 View
2007-08-02 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2007-07-17 CTFR Final Rejection 21 View
2007-07-17 1449 List of References cited by applicant and considered by examiner 2 View
2007-04-26 WFEE Fee Worksheet (SB06) 1 View
2007-04-26 WCLM Claims Worksheet (PTO-2022) 1 View
2007-03-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-03-27 CLM Claims 7 View
2007-03-27 REM Applicant Arguments/Remarks Made in an Amendment 15 View
2007-03-27 TRAN.LET Transmittal Letter 1 View
2007-01-16 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2007-01-16 FOR Foreign Reference 6 View
2006-12-28 CTNF Non-Final Rejection 23 View
2006-12-28 892 List of references cited by examiner 1 View
2006-12-28 SRFW Search information including classification, databases and other search related notes 1 View
2006-12-26 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-12-26 FOR Foreign Reference 3 View
2006-12-22 SRNT Examiner's search strategy and results 7 View
2006-10-16 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 2 View
2006-10-16 CLM Claims 7 View
2006-10-16 REM Applicant Arguments/Remarks Made in an Amendment 19 View
2006-10-16 RCEX Request for Continued Examination (RCE) 1 View
2006-10-16 WFEE Fee Worksheet (SB06) 1 View
2006-09-26 CTAV Advisory Action (PTOL-303) 5 View
2006-09-11 A.NE Response After Final Action 2 View
2006-09-11 CLM Claims 7 View
2006-09-11 REM Applicant Arguments/Remarks Made in an Amendment 19 View
2006-09-11 WFEE Fee Worksheet (SB06) 1 View
2006-07-14 CTFR Final Rejection 23 View
2006-07-14 1449 List of References cited by applicant and considered by examiner 8 View
2006-07-14 892 List of references cited by examiner 1 View
2006-07-14 SRFW Search information including classification, databases and other search related notes 1 View
2006-07-07 SRNT Examiner's search strategy and results 5 View
2006-06-15 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-06-15 FOR Foreign Reference 3 View
2006-06-15 FOR Foreign Reference 5 View
2006-05-19 WFEE Fee Worksheet (SB06) 3 View
2006-05-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-05-01 CLM Claims 7 View
2006-05-01 REM Applicant Arguments/Remarks Made in an Amendment 14 View
2006-05-01 LET. Miscellaneous Incoming Letter 2 View
2006-05-01 WFEE Fee Worksheet (SB06) 1 View
2006-04-18 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
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2006-04-04 NTC.A.NONCPL Notice to the applicant regarding a non-compliant or non-responsive amendment 2 View
2006-03-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-03-03 WFEE Fee Worksheet (SB06) 1 View
2006-01-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2006-01-17 CLM.NE Claim-Amendment Not Entered 1 View
2006-01-17 WFEE Fee Worksheet (SB06) 1 View
2005-12-19 NTC.A.NONCPL Notice to the applicant regarding a non-compliant or non-responsive amendment 3 View
2005-10-19 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-10-19 C.AD Change of Address 1 View
2005-09-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2005-09-26 CLM Claims 7 View
2005-09-26 REM Applicant Arguments/Remarks Made in an Amendment 14 View
2005-09-26 C.AD Change of Address 1 View
2005-09-26 WFEE Fee Worksheet (SB06) 1 View
2005-06-28 CTNF Non-Final Rejection 19 View
2005-06-28 1449 List of References cited by applicant and considered by examiner 1 View
2005-06-28 892 List of references cited by examiner 1 View
2005-06-28 SRFW Search information including classification, databases and other search related notes 1 View
2005-06-23 SRNT Examiner's search strategy and results 3 View
2005-05-12 RCEX Request for Continued Examination (RCE) 2 View
2005-04-13 CTAV Advisory Action (PTOL-303) 3 View
2005-04-01 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 2 View
2005-04-01 CLM Claims 7 View
2005-04-01 REM Applicant Arguments/Remarks Made in an Amendment 14 View
2005-04-01 WFEE Fee Worksheet (SB06) 1 View
2005-02-25 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-02-25 FOR Foreign Reference 7 View
2005-02-25 FOR Foreign Reference 8 View
2005-02-10 CTFR Final Rejection 18 View
2005-02-10 892 List of references cited by examiner 1 View
2005-02-10 SRFW Search information including classification, databases and other search related notes 1 View
2005-02-09 SRNT Examiner's search strategy and results 2 View
2004-12-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-12-07 LET. Miscellaneous Incoming Letter 2 View
2004-11-05 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-10-15 A.I. Informal or Non-Responsive Amendment 2 View
2004-10-15 SPEC Specification 1 View
2004-10-15 CLM Claims 7 View
2004-10-15 REM Applicant Arguments/Remarks Made in an Amendment 19 View
2004-10-15 REM Applicant Arguments/Remarks Made in an Amendment 34 View
2004-10-15 DRW Drawings-only black and white line drawings 2 View
2004-10-15 FR TRANS Translation of Foreign Priority Documents 35 View
2004-10-15 136A Authorization for Extension of Time all replies 2 View
2004-10-15 WFEE Fee Worksheet (SB06) 1 View
2004-07-13 CTNF Non-Final Rejection 12 View
2004-07-13 1449 List of References cited by applicant and considered by examiner 4 View
2004-07-13 892 List of references cited by examiner 2 View
2004-07-13 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-07 SRNT Examiner's search strategy and results 2 View
2004-05-07 PA.. Power of Attorney 1 View
2004-04-19 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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2004-02-13 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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2003-06-12 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-06-12 FRPR Certified Copy of Foreign Priority Application 83 View
2003-03-24 C.AD Change of Address 1 View
2002-08-23 TRNA Transmittal of New Application 1 View
2002-08-23 SPEC Specification 47 View
2002-08-23 CLM Claims 5 View
2002-08-23 ABST Abstract 1 View
2002-08-23 DRW Drawings-only black and white line drawings 17 View
2002-08-23 OATH Oath or Declaration filed 2 View
2002-08-23 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-08-23 FOR Foreign Reference 7 View
2002-08-23 FRPR Certified Copy of Foreign Priority Application 14 View
2002-08-23 WFEE Fee Worksheet (SB06) 1 View
2002-08-23 WFEE Fee Worksheet (SB06) 1 View
2002-08-23 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
10/226,961
Filed
2002-08-23
Pub. No.
US20030041971A1
Art Unit
1716