Patent Assignment
Reel/Frame 013254/0429
Assignment of Assignor's Interest
Recorded: 2002-11-19
Pages: 22
Assignors
SUN, LIZHONG
Executed: 2002-10-24
CHEN, LIANG-YUH
Executed: 2002-10-25
NEO, SIEW
Executed: 2002-11-04
LI, FENG Q.
Executed: 2002-10-24
DUBOUST, ALAIN
Executed: 2002-10-24
TSAI, STAN D.
Executed: 2002-10-30
MAVLIEV, RASHID
Executed: 2002-10-25
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, M/S #2061, PATENT DEPARTMENT, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Control of Removal Profile in Electrochemically Assisted Cmp