Patent Assignment
Reel/Frame 013256/0285
Assignment of Assignor's Interest
Recorded: 2002-09-03
Pages: 2
Assignors
KITAMOTO, TORU
Executed: 2002-06-27
KAMEI, KENJI
Executed: 2002-06-27
INOUE, HIDEKAZU
Executed: 2002-06-27
HAMADA, TETSUYA
Executed: 2002-06-27
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENIJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.