Patent Assignment
Reel/Frame 013267/0455
Assignment of Assignor's Interest
Recorded: 2002-08-29
Pages: 2
Assignors
KITAMOTO, TORU
Executed: 2002-07-25
KAMEI, KENJI
Executed: 2002-07-25
INOUE, HIDEKAZU
Executed: 2002-07-25
HAMADA, TETSUYA
Executed: 2002-07-26
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU KYOTO, JAPAN
Covered Property
(1)
Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.