Patent Assignment
Reel/Frame 013271/0846
Assignment of Assignor's Interest
Recorded: 2002-09-04
Pages: 9
Assignors
KAMP, TOM A.
Executed: 2002-08-27
GOTTSCHO, RICHARD
Executed: 2002-08-27
LEE, STEVE
Executed: 2002-08-27
LEE, CHRIS
Executed: 2002-08-28
YAMAGUCHI, YOKO
Executed: 2002-08-29
VAHEDI, VAHID
Executed: 2002-08-29
EPPLER, AARON
Executed: 2002-08-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Variable Temperature Processes for Tunable Electrostatic Chuck