Patent Assignment
Reel/Frame 013275/0428
Assignment of Assignor's Interest
Recorded: 2002-09-06
Pages: 3
Assignee
INTEL CORPORATION
2200 MISSION BLVD., SANTA CLARA, CALIFORNIA, 95054-1549
Covered Property
(1)
In-Situ Sequential High Density Plasma Deposition and Etch Processing for Gap Fill
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.