Patent Assignment
Reel/Frame 013278/0034
Assignment of Assignor's Interest
Recorded: 2002-09-10
Pages: 2
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Wafer Inspection Method of Charging Wafer with a Charged Particle Beam Then Measuring Electric Properties Thereof and Inspection Device Based Thereon