Patent Assignment
Reel/Frame 013278/0937
Assignment of Assignor's Interest
Recorded: 2002-09-12
Pages: 3
Assignors
MORIYA, TSUYOSHI
Executed: 2002-08-30
ITO, NATSUKO
Executed: 2002-08-30
UESUGI, FUMIHIKO
Executed: 2002-08-30
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Devices and Semiconductor Manufacturing Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.