Patent Assignment
Reel/Frame 013282/0602
Assignment of Assignor's Interest
Recorded: 2002-08-26
Pages: 2
Assignor
CHANDRASEKARAN, NAGASUBRAMANIYAN
Executed: 2002-08-21
Assignee
MICRON TECHNOLOGY, INC.
8000 SOUTH FEDERAL WAY, BOISE, IDAHO, 83706-9632
Covered Property
(1)
Methods and Systems for Conditioning Planarizing Pads Used in Planarizing Substrates