Patent Assignment
Reel/Frame 013287/0100
Assignment of Assignor's Interest
Recorded: 2002-09-09
Pages: 3
Assignors
MUI, DAVID S.L.
Executed: 2002-09-03
SASANO, HIROKI
Executed: 2002-09-03
LUI, WEI
Executed: 2002-09-03
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUNSEL, M/S 2061, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Methodology for Repeatable Post Etch Cd in a Production Tool