Patent Assignment
Reel/Frame 013324/0936
Assignment of Assignor's Interest
Recorded: 2002-09-18
Pages: 2
Assignor
STEGER, ROBERT J.
Executed: 2002-09-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for the Compensation of Edge Ring Wear in a Plasma Processing Chamber