Patent Assignment
Reel/Frame 013326/0171
Assignment of Assignor's Interest
Recorded: 2002-09-23
Received: 2002-09-30
Pages: 3
Assignor
SHIMANE, TAKASHI
Executed: 2002-08-30
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Applying apparatus and method of controlling film thickness for enabling uniform thickness
Application:
10/171,250 →