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App. No. 10/171,250 · Confirmation No. 9127

Applying apparatus and method of controlling film thickness for enabling uniform thickness

Inventor: Takashi Shimane
Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2002-06-12 TRNA Transmittal of New Application 1 View
2002-06-12 SPEC Specification 20 View
2002-06-12 CLM Claims 10 View
2002-06-12 ABST Abstract 1 View
2002-06-12 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
App. No.
10/171,250
Filed
2002-06-12
Pub. No.
US20030017256A1
Art Unit
1734