Patent Assignment
Reel/Frame 013326/0251
Assignment of Assignor's Interest
Recorded: 2002-09-23
Pages: 3
Assignor
STRANG, ERIC J.
Executed: 2002-09-16
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method of and Apparatus for Tunable Gas Injection in a Plasma Processing System