Patent Assignment
Reel/Frame 013334/0145
Assignment of Assignor's Interest
Recorded: 2002-06-27
Pages: 4
Assignors
PETASCH, THOMAS
Executed: 2002-03-27
MUENKER, HARTMUT
Executed: 2002-05-16
KLEIN, KLAUS-DIETER
Executed: 2002-03-19
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, D-57271 HILCHENBACH-DAHLBRUCH, GERMANY
Covered Property
(1)
Apparatus for Mounting an Optical Element in an Optical System
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 19, 2003
From: PETASCH, THOMAS; MUENKER, HARTMUT; KLEIN, KLAUS-DIETER
To: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Reel/Frame 013766/0843 →
Change of Name
Jun 28, 2004
From: CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
To: CARL ZEISS SMT AG
Reel/Frame 015505/0725 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →