Patent Assignment
Reel/Frame 013347/0976
Assignment of Assignor's Interest
Recorded: 2002-10-03
Pages: 5
Assignors
ADEL, MICHAEL
Executed: 2002-09-01
GHINOVKER, MARK
Executed: 2002-09-01
MIEHER, WALTER DEAN
Executed: 2002-08-30
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Overlay Marks, Methods of Overlay Mark Design and Methods of Overlay Measurements