Patent Assignment
Reel/Frame 013378/0488
Assignment of Assignor's Interest
Recorded: 2002-10-08
Received: 2002-10-17
Pages: 3
Assignor
CAVENEY, ROBERT T.
Executed: 2002-10-04
Assignee
BROOKS AUTOMATION INC.
15 ELIZABETH DRIVE, CHELMSFORD, MA, 01824, UNITED STATES
Covered Property
(1)
Apparatus for Alignment and Orientation of a Wafer for Processing
Application:
10/267,465 →