IP Library › Granted Patent US 6,769,861
Granted Patent Utility
US 6,769,861 · Confirmation No. 9809

APPARATUS FOR ALIGNMENT AND ORIENTATION OF A WAFER FOR PROCESSING

Inventor: Robert T. Caveney
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-05-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-13 LET. Miscellaneous Incoming Letter 1 View
2004-05-13 DRW Drawings-only black and white line drawings 3 View
2003-12-19 LET. Miscellaneous Incoming Letter 1 View
2003-12-19 DRW Drawings-only black and white line drawings 3 View
2002-10-08 TRNA Transmittal of New Application 5 View
2002-10-08 SPEC Specification 12 View
2002-10-08 CLM Claims 5 View
2002-10-08 ABST Abstract 1 View
2002-10-08 DRW Drawings-only black and white line drawings 3 View
2002-10-08 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,769,861
App. No.
10/267,465
Filed
2002-10-08
Granted
2004-08-03
Pub. No.
US20040067128A1
Art Unit
3652
PTA
-83 days