IP Library › Assignment 073446/0080
Patent Assignment
Reel/Frame 073446/0080

Release of Security Interest Recorded at Reel/Frame 038891/0765

Recorded: 2025-11-04 Received: 2025-11-04 Pages: 27
Assignor
Assignees
AZENTA, INC. (F/K/A BROOKS AUTOMATION, INC.)
200 SUMMIT DRIVE, 6TH FLOOR, BURLINGTON, MA, 01803, UNITED STATES
AZENTA USA, INC. (F/K/A BIOSTORAGE TECHNOLOGIES, INC.)
200 SUMMIT DRIVE, 6TH FLOOR, BURLINGTON, MA, 01803, UNITED STATES
Covered Properties (100)
Automated Cryogenic Storage System
Application: 15/085,431 →
Unequal Link Scara Arm
Application: 15/012,425 →
Cryopump
Application: 15/012,399 →
Substrate Processing Apparatus
Application: 14/988,256 →
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Application: 14/976,952 →
Compact Direct Drive Spindle
Application: 14/941,888 →
Tool Auto-Teach Method and Apparatus
Application: 14/937,676 →
Wafer Aligner
Application: 14/928,352 →
Storage Stacks
Application: 14/875,921 →
Dual Scara Arm
Application: 14/868,689 →
Method And Apparatus For Providing Temperature Control To A Cryopump
Application: 14/852,365 →
Side Opening Unified Pod
Application: 14/822,392 →
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Application: 14/822,310 →
Automated Vault Module
Application: 62/194,621 →
Scalable Motion Control System
Application: 14/698,110 →
Cryogenic Freezer
Application: 62/140,160 →
Automated Cryogenic Storage System
Application: 62/140,157 →
Sample Storage and Retrieval System
Application: 14/671,423 →
Dual Arm Robot
Application: 14/617,052 →
Stacked Process Modules for a Semiconductor Handling System
Application: 14/611,697 →
Portable Cryogenic Workstation
Application: 14/600,751 →
Substrate Processing Apparatus
Application: 14/579,067 →
Substrate Transport Apparatus
Application: 14/568,742 →
Reduced Capacity Carrier and Method of Use
Application: 14/541,934 →
Position Feedback for Sealed Environments
Application: 14/540,058 →
Method and Apparatus for Brushless Electrical Machine Control
Application: 14/540,077 →
Sealed Switched Reluctance Motor
Application: 14/540,055 →
Sealed Robot Drive
Application: 14/540,072 →
Integrated Systems for Interfacing with Substrate Container Storage Systems
Application: 14/537,696 →
Access Arbitration System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same
Application: 14/530,102 →
Helium Management Control System
Application: 14/523,507 →
Port Door Positioning Apparatus and Associated Methods
Application: 14/508,974 →
Volumetric Measurement
Application: 14/344,944 →
Load Port Module
Application: 14/472,678 →
Substrate Transport Apparatus
Application: 14/469,260 →
Substrate Processing Apparatus
Application: 14/377,987 →
Workpiece Structures and Apparatus for Accessing Same
Application: 14/452,490 →
Load Station
Application: 14/344,930 →
Process Apparatus with on-the-Fly Substrate Centering
Application: 14/325,702 →
Device and Method for Removing a Peelable Seal
Application: 14/316,414 →
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
Application: 14/305,715 →
Transport Apparatus
Application: 14/365,277 →
Time-Optimal Trajectories for Robotic Transfer Devices
Application: 14/342,035 →
Semiconductor Wafer Handling and Transport
Application: 14/353,153 →
Sample Selector
Application: 14/229,077 →
Elevator-Based Tool Loading and Buffering System
Application: 14/223,553 →
Semiconductor Wafer Handling Transport
Application: 14/216,829 →
Load Lock Chamber
Application: 14/195,086 →
Substrate Processing Apparatus
Application: 14/180,876 →
Substrate Transport
Application: 14/161,039 →
Wafer Center Finding with Kalman Filter
Application: 14/159,223 →
Substrate Transport Apparatus with Active Edge Gripper
Application: 14/148,785 →
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Application: 14/089,439 →
Substrate Transport Apparatus
Application: 14/071,314 →
Compact Substrate Transport System
Application: 14/058,436 →
High Speed Substrate Aligner Apparatus
Application: 14/042,248 →
Semiconductor Manufacturing Systems
Application: 14/014,910 →
Manipulator Auto-Teach and Position Correction System
Application: 13/914,397 →
Substrate Loading and Unloading Station with Buffer
Application: 13/908,909 →
Gripper Apparatus and Method for Containers of Different Sizes
Application: 13/892,926 →
Linear Vacuum Robot with Z Motion and Articulated Arm
Application: 13/861,693 →
Tray Engine with Slide Attached to an End Effector Base
Application: 13/830,692 →
Dual Scara Arm
Application: 13/768,495 →
Substrate Processing Apparatus
Application: 13/764,373 →
Multi-Refrigerator High Speed Cryopump
Application: 13/753,093 →
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Application: 13/739,831 →
Transport System
Application: 13/692,749 →
Robot Drive with Magnetic Spindle Bearings
Application: 13/646,282 →
Modular Sample Store
Application: 13/501,890 →
Load Lock Fast Pump Vent
Application: 13/625,704 →
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Application: 13/625,442 →
Wafer Center Finding with Kalman Filter
Application: 13/617,333 →
Semiconductor Manufacturing Process Module
Application: 13/616,683 →
Substrate Transport Apparatus
Application: 13/617,171 →
Access Arbitration Module and System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same
Application: 13/605,941 →
Automated System for Storing, Retrieving and Managing Samples
Application: 13/595,817 →
Substrate Processing Apparatus with Motors Integral to Chamber Walls
Application: 13/567,812 →
Fast Swap Dual Substrate Transport for Load Lock
Application: 13/561,873 →
Method and Device for Compensation for Dimensional Variations in Low Temperature Sample Group Holders
Application: 13/555,957 →
Compact Direct Drive Spindle
Application: 13/547,786 →
Storage Stacks
Application: 13/501,880 →
Dynamic Storage and Transfer System Integrated with Autonomous Guided/Roving Vehicle
Application: 13/475,723 →
Narrow Width Loadport Mechanism for Cleanroom Material Transfer Systems
Application: 13/464,923 →
Horizontal Displacement Mechanism for Cleanroom Material Transfer Systems
Application: 13/457,278 →
Substrate Transport Apparatus with Active Edge Gripper
Application: 13/436,155 →
Substrate Processing Apparatus
Application: 13/417,837 →
Multiple Dimension Position Sensor
Application: 13/412,392 →
Wafer Center Finding with Charge-Coupled Devices
Application: 13/406,252 →
Substrate Apparatus Calibration and Synchronization Procedure
Application: 13/366,968 →
Workpiece Support Structures and Apparatus for Accessing Same
Application: 13/337,028 →
Drive Assembly for Robotic Conveyor System
Application: 13/334,619 →
Workpiece Handling Modules
Application: 13/334,181 →
Dual Arm Robot
Application: 13/293,717 →
Linear Vacuum Robot with Z Motion and Articulated Arm
Application: 13/286,186 →
Device and Method for Removing a Peelable Seal
Application: 13/284,437 →
Coaxial Drive Vacuum Robot
Application: 13/270,844 →
Stacked Process Modules for a Semiconductor Handling System
Application: 13/248,600 →
Semiconductor Manufacturing Systems
Application: 13/248,386 →
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Application: 13/230,280 →
Substrate Processing Apparatus with Motors Integral to Chamber Walls
Application: 13/219,267 →