Unequal link SCARA arm
View Patent ↗A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
1. A substrate transport apparatus comprising:
a drive section;
a controller operably connected to the drive section; and
a substrate transport with an upper arm, forearm and substrate holder, a proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint, a proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint, the substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint, the upper arm and the forearm being unequal in length from joint center to joint center;
wherein the substrate transport is adapted to transport substrate to and from substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the substrate holding areas, the substrate holding areas comprising at least two side by side substrate holding areas facing a common direction on one side of the shoulder joint and at least two side by side substrate holding areas facing a common direction on another side of the shoulder joint, and the controller is configured to control the drive section for effecting radial line extension of the substrate transport so that the substrate is transported along a radial line to at least one of the at least two side by side substrate holding areas on one or more of the one side of the shoulder joint and the other side of the shoulder joint, and the upper arm, forearm and substrate holder are configured so that during the radial line extension, away from the shoulder joint to the at least one of the at least two side by side substrate holding areas on one or more of the one side of the shoulder joint and the other side of the shoulder joint, the substrate holder rotates about a center of the substrate during radial movement of the substrate and relative rotation between the upper arm and forearm changes direction during extension to offset motion along the radial line of extension and the wrist joint travels along parallel paths to each of the substrate holding areas.
2. The substrate transport apparatus of claim 1 , wherein the upper arm is shorter than the forearm.
3. The substrate transport apparatus of claim 1 , wherein the drive section comprises a first, second and third drives, the first drive being drivingly connected to a first drive shaft, the second drive being drivingly connected to a second drive shaft and the third drive being drivingly connected to a third drive shaft.
4. The substrate transport apparatus of claim 3 , wherein the controller sends control signals to the first, second and third drives thereby effecting rotation of the upper arm, forearm and substrate holder.
5. The substrate transport apparatus of claim 3 , wherein the upper arm is mounted to the first drive shaft to rotate in unison with the first drive shaft and the forearm is rotatably mounted to the upper arm to rotate relative to the upper arm.
6. The substrate transport apparatus of claim 5 , wherein the substrate holder is rotatably mounted to the forearm to rotate relative to the forearm and the upper arm.
7. The substrate transport apparatus of claim 6 , wherein the forearm is drivingly connected to the second drive shaft and the substrate holder is drivingly connected to the third drive shaft.
8. The substrate transport apparatus of claim 1 , wherein the upper arm, forearm and substrate holder are rotated independently of each other effecting the translation of substrate into and out of the at least two side by side substrate holding areas.
9. The substrate transport apparatus of claim 1 , wherein the substrate transport transports substrate rectilinearly into and out of the at least two side by side substrate holding areas along at least two parallel axes of translation corresponding to each of the at least two side by side substrate holding areas.
10. The substrate transport apparatus of claim 1 , wherein the at least two side by side substrate holding areas comprise a first and second substrate holding areas being in line with respect to each other and equidistant from each other, the first and second substrate holding areas being oriented perpendicular to the axes of translation.
11. The substrate transport apparatus of claim 1 , wherein the at least two side by side substrate holding areas comprise three side by side substrate holding areas including a first, second and third substrate holding areas being in line with respect to each other and equidistant from each other, the second substrate holding area being between the first and third substrate holding areas, the first, second and third substrate holding areas being oriented perpendicular to the axes of translation.
12. The substrate transport apparatus of claim 11 , wherein a center of the drive section is offset from the axis of translation corresponding to the second substrate holding area and between the axes of translation corresponding to the first and third substrate holding areas.
13. The substrate transport apparatus of claim 1 , wherein the substrate holder is independently rotated so that when the substrate transport is extended from a retracted position along a radial line, the wrist is rotating about a center of the substrate until a point where the center of the substrate and wrist can be placed along the radial line.