IP Library › Assignment 058945/0748
Patent Assignment
Reel/Frame 058945/0748

Second Lien Patent Security Agreement

Recorded: 2022-02-02 Received: 2022-02-02 Pages: 30
Assignor
BROOKS AUTOMATION US, LLC
Executed: 2022-02-01
Assignee
GOLDMAN SACHS BANK USA
200 WEST STREET, NEW YORK, NY, 10282, UNITED STATES
Covered Properties (100)
Automatic Wafer Centering Method and Apparatus
Application: 17/398,847 →
Tray Engine and Methods for Transferring Trays to and From Tools and in Sorters
Application: 17/382,858 →
Automated Teach Apparatus for Robotic Systems and Method Therefor
Application: 17/362,565 →
Substrate Mapping Apparatus and Method Therefor
Application: 17/362,599 →
Load Port Module
Application: 17/341,638 →
On the Fly Automatic Wafer Centering Method and Apparatus
Application: 17/229,495 →
Substrate Process Apparatus
Application: 17/180,298 →
Load Port Module
Application: 17/176,949 →
Substrate Processing Apparatus
Application: 17/167,831 →
Dual Scara Arm
Application: 17/158,723 →
Transport Apparatus and Adapter Pendant
Application: 17/158,523 →
Substrate Transport Apparatus
Application: 17/156,007 →
Process Apparatus with on-the-Fly Substrate Centering
Application: 17/136,661 →
Substrate Processing Apparatus
Application: 17/108,530 →
Load Lock Fast Pump Vent
Application: 17/108,473 →
Method and Apparatus for Health Assessment of a Transport Apparatus
Application: 17/103,243 →
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Application: 17/102,811 →
Substrate Transport Apparatus
Application: 17/081,811 →
Tool Auto-Teach Method and Apparatus
Application: 17/014,575 →
Wafer Aligner
Application: 17/002,587 →
Substrate Transport Apparatus
Application: 16/996,409 →
Dual Arm Robot
Application: 16/990,775 →
Robot Embedded Vision Apparatus
Application: 16/942,255 →
Substrate Process Apparatus
Application: 16/899,151 →
Method and Apparatus for Substrate Transport Apparatus Position Compensation
Application: 16/872,864 →
Position Feedback for Sealed Environments
Application: 16/838,785 →
Substrate Processing Apparatus
Application: 16/825,663 →
Method and Apparatus for Brushless Electrical Machine Control
Application: 16/793,623 →
Transport Apparatus
Application: 16/787,184 →
Load Lock Fast Pump Vent
Application: 16/722,930 →
Compact Direct Drive Spindle
Application: 16/702,403 →
Scalable Motion Control System
Application: 16/696,822 →
Load Port Module
Application: 16/692,443 →
Load Port Module
Application: 16/692,359 →
Sealed Robot Drive
Application: 16/674,933 →
Transport Apparatus with Linear Bearing
Application: 16/668,290 →
Substrate Processing Apparatus
Application: 16/592,431 →
Method and Apparatus for Substrate Alignment
Application: 16/570,453 →
Unequal Link Scara Arm
Application: 16/566,730 →
Substrate Transport
Application: 16/552,881 →
Tool Auto-Teach Method and Apparatus
Application: 16/539,819 →
Sealed Switched Reluctance Motor
Application: 16/506,679 →
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
Application: 16/460,676 →
Substrate Processing Apparatus
Application: 16/444,225 →
Substrate Transport Apparatus
Application: 16/354,954 →
Substrate Transport Apparatus
Application: 16/272,974 →
Automatic Wafer Centering Method and Apparatus
Application: 16/257,595 →
Dual Scara Arm
Application: 16/201,899 →
Transport Apparatus
Application: 16/201,539 →
On the Fly Automatic Wafer Centering Method and Apparatus
Application: 16/197,087 →
Substrate Transport Apparatus
Application: 16/197,107 →
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Application: 16/181,208 →
Substrate Transport Apparatus with Independent Accessory Feedthrough
Application: 16/151,598 →
Substrate Transport Apparatus
Application: 16/121,148 →
End Effector with Slides for Transferring Trays
Application: 16/116,025 →
Time-Optimal Trajectories for Robotic Transfer Devices
Application: 16/115,505 →
Dual Arm Robot
Application: 16/043,757 →
Semiconductor Process Transport Apparatus Comprising an Adapter Pendant
Application: 16/029,320 →
Tool Auto-Teach Method and Apparatus
Application: 16/011,978 →
Collaborative Robot
Application: 15/981,047 →
Method and Apparatus for Health Assessment of a Transport Apparatus
Application: 15/971,827 →
Sealed Robot Drive
Application: 15/952,595 →
Method and Apparatus for Substrate Transport
Application: 15/889,811 →
Method and Apparatus for Substrate Transport Apparatus Position Compensation
Application: 15/880,387 →
Workpiece Support Structures and Apparatus for Accessing Same
Application: 15/875,890 →
Substrate Transport Apparatus with Interchangeable Motor Modules
Application: 15/743,727 →
Semiconductor Wafer Handling and Transport
Application: 15/866,215 →
Substrate Processing Apparatus
Application: 15/849,002 →
Integrated Systems for Interfacing with Substrate Container Storage Systems
Application: 15/816,728 →
Substrate Transport Apparatus
Application: 15/702,436 →
Compact Direct Drive Spindle
Application: 15/695,744 →
Substrate Processing Apparatus
Application: 15/693,871 →
Collaborative Robot
Application: 15/682,632 →
Substrate Processing Apparatus
Application: 15/634,871 →
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Application: 15/634,957 →
Collaborative Robot
Application: 15/618,525 →
Dual Arm Robot
Application: 15/489,449 →
High Speed Substrate Aligner Apparatus
Application: 15/465,326 →
Wafer Tray Sorter with Door Coupled to Detector
Application: 15/386,799 →
Time-Optimal Trajectories for Robotic Transfer Devices
Application: 15/376,119 →
Process Apparatus with on-the-Fly Substrate Centering
Application: 15/369,573 →
Load Lock Fast Pump Vent
Application: 15/333,021 →
Substrate Transport Apparatus
Application: 15/114,275 →
Substrate Processing Apparatus
Application: 15/215,143 →
On the Fly Automatic Wafer Centering Method and Apparatus
Application: 15/209,497 →
Substrate Transport Apparatus
Application: 15/110,130 →
Processing Apparatus
Application: 15/103,268 →
Workpiece Handling Modules
Application: 15/137,722 →
Unequal Link Scara Arm
Application: 15/012,425 →
Substrate Processing Apparatus
Application: 14/988,256 →
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Application: 14/976,952 →
Compact Direct Drive Spindle
Application: 14/941,888 →
Tool Auto-Teach Method and Apparatus
Application: 14/937,676 →
Wafer Aligner
Application: 14/928,352 →
Dual Scara Arm
Application: 14/868,689 →
Side Opening Unified Pod
Application: 14/822,392 →
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Application: 14/822,310 →
Scalable Motion Control System
Application: 14/698,110 →
Dual Arm Robot
Application: 14/617,052 →
Substrate Processing Apparatus
Application: 14/579,067 →