IP Library Granted Patent US 11,404,939
Granted Patent B2
US 11,404,939 · App. 16/838,785 · Granted Aug 2, 2022

Position feedback for sealed environments

Inventors: Jairo T. Moura (Marlboro, MA); Reza Saeidpourazar (Nashua, NH); Branden Gunn (Reading, MA); Matthew W. Coady (Hollis, NH); Ulysses Gilchrist (Reading, MA)
Assignee: Brooks Automation, US LLC
H02K11/215H01L21/67259H01L21/67706H01L21/67742H01L21/68707H02K1/146H02K1/24H02K5/128
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Quick Facts
Patent No.
US 11,404,939
App. No.
16/838,785
Granted
Aug 2, 2022
Kind
B2
Abstract

A transport apparatus comprising a housing, a variable reluctance drive mounted to the housing, and at least one transport arm connected to the variable reluctance drive where the drive includes at least one rotor having salient poles of magnetic permeable material and disposed in an isolated environment, at least one stator having salient pole structures each defining a salient pole with corresponding coil units coiled around the respective salient pole structure and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment; and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor, where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.

Claims (36)

1. A transport apparatus comprising:

a housing;

a variable reluctance drive mounted to the housing; and

at least one transport arm connected to the variable reluctance drive;

where the drive includes

at least one rotor having salient poles of magnetic permeable material and disposed in an isolated environment;

at least one stator having salient pole structures each defining a salient pole with corresponding coil units coiled around the respective salient pole structure and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator;

at least one seal partition configured to isolate the isolated environment where the closed magnetic flux circuit passes through the at least one seal partition; and

at least one sensor including

a magnetic sensor member connected to the housing; at least one sensor track connected to the at least one rotor;

where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.

2. The transport apparatus of claim 1 , wherein at least a portion of the at least one seal partition is integral to the magnetic sensor member.

3. The transport apparatus of claim 1 , wherein the at least one sensor comprises at least one ferromagnetic flux loop having a sensor air gap where the magnetic sensor member interfaces with the at least one ferromagnetic flux loop.

4. The transport apparatus of claim 3 , wherein the magnetic sensor member is configured to detect changes in a reluctance of the sensor air gap.

5. The transport apparatus of claim 3 , wherein the at least one ferromagnetic flux loop comprises first and second ferromagnetic flux loops having a sensor bridge member between the first and second ferromagnetic flux loops where the sensor air gap is located in the sensor bridge member, one of the first and second ferromagnetic flux loops having a track air gap in which at least a portion of the at least one sensor track is disposed.

6. The transport apparatus of claim 3 , wherein each of the at least one ferromagnetic flux loop includes a track interface portion disposed in the isolated environment and a sensor member interface portion disposed outside the isolated environment, the track interface portion and the sensor member interface portion being separated by the at least one seal partition.

7. The transport apparatus of claim 3 , wherein the at least one ferromagnetic flux loop includes flux concentrator elements disposed in the sensor air gap.

8. The transport apparatus of claim 3 , wherein the at least one ferromagnetic flux loop includes a track air gap in which at least a portion of the at least one sensor track is disposed.

9. The transport apparatus of claim 1 , wherein the at least one sensor track includes a first track having a first pitch and at least a second track having a respective pitch that is different than at least the first pitch, and the at least one sensor includes a first sensor corresponding to the first track and at least a second sensor corresponding to a respective one of the at least second track.

10. The transport apparatus of claim 1 , wherein the magnetic sensor member comprises a differential sensor having sensor elements arranged to substantially match a pitch of the at least one sensor track such that differential sine and cosine output signals are obtained from the magnetic sensor member.

11. The transport apparatus of claim 10 , wherein the sensor elements form a Wheatstone bridge.

12. The transport apparatus of claim 10 , wherein the sensor elements are disposed on a common printed circuit board of the magnetic sensor member.

13. The transport apparatus of claim 1 , wherein the at least one sensor interfaces substantially directly with the at least one sensor track through the at least one seal partition.

14. The transport apparatus of claim 1 , wherein, the variable reluctance drive being configured to effect at least extension and retraction of the at least one transport arm.

15. A method of operating a transport apparatus, the method comprising:

providing at least one transport arm connected to a variable reluctance drive, where the drive includes:

at least one rotor disposed in an isolated environment,

at least one stator disposed outside the isolated environment where a closed magnetic flux circuit is formed between the at least one rotor and the at least one stator, and

at least one sensor including:

a magnetic sensor member connected to the housing and disposed outside the isolated environment, and

at least one sensor track connected to the at least one rotor and disposed within the isolated environment; and

generating, with a sensor controller, sensor signal commands to the at least one sensor based on sensor signals received from the at least one sensor, where the sensor signal commands effect a change in at least a predetermined characteristic of the sensor signals.

16. The method of claim 15 , wherein the isolated environment is isolated by at least one seal partition and at least a portion of the at least one seal partition is integral to the magnetic sensor member.

17. The method of claim 16 , wherein the at least one sensor interfaces substantially directly with the at least one sensor track through the at least one seal partition.

18. The method of claim 15 , wherein the magnetic sensor member interfaces with a ferromagnetic flux loop of the at least one sensor within a sensor air gap of the ferromagnetic flux loop.

19. The method of claim 18 , wherein each of the at least one ferromagnetic flux loop includes a track interface portion disposed in the isolated environment and a sensor member interface portion disposed outside the isolated environment, the track interface portion and the sensor member interface portion being separated by the at least one seal partition.

Assignments (5)
SECOND LIEN PATENT SECURITY AGREEMENT Recorded Feb 2, 2022
From: BROOKS AUTOMATION US, LLC
To: GOLDMAN SACHS BANK USA
Reel/Frame 058945/0748 →
FIRST LIEN PATENT SECURITY AGREEMENT Recorded Feb 2, 2022
From: BROOKS AUTOMATION US, LLC
To: BARCLAYS BANK PLC
Reel/Frame 058950/0146 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2021
From: BROOKS AUTOMATION,INC
To: BROOKS AUTOMATION HOLDING, LLC
Reel/Frame 058481/0740 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2021
From: BROOKS AUTOMATION HOLDING, LLC
To: BROOKS AUTOMATION US, LLC
Reel/Frame 058482/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 2, 2020
From: MOURA, JAIRO T.; SAEIDPOURAZAR, REZA; GUNN, BRANDEN; COADY, MATTHEW W.; GILCHRIST, ULYSSES
To: BROOKS AUTOMATION, INC.
Reel/Frame 052307/0482 →
Continuity (3)
Continuation 14540058 · Nov 13, 2014
Provisional Application 61903726 · Nov 13, 2013
Related Publication 20200389075A1 · Dec 10, 2020