Patent Assignment
Reel/Frame 058481/0740
Assignment of Assignor's Interest
Recorded: 2021-12-09
Pages: 63
Assignor
BROOKS AUTOMATION,INC
Executed: 2021-10-01
Assignee
BROOKS AUTOMATION HOLDING, LLC
15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824
Covered Properties
(780)
Loading and Unloading Station for Semiconductor Processing Installations
Patent:
6,071,059 →
Application:
09/003,025 →
Method for Electronically Tracking Containers to Avoid Misprocessing of Contents
Patent:
6,138,058 →
Application:
09/003,542 →
Robot Mounting De-Coupling Technique
Patent:
5,931,626 →
Application:
09/008,615 →
Intelligent Minienvironment
Application:
09/039,808 →
Method of Transferring Substrates with Two Different Substrate Holding End Effectors
Patent:
6,481,956 →
Application:
09/044,820 →
Substrate Processing Apparatus with Small Batch Load Lock
Patent:
6,059,507 →
Application:
09/049,314 →
Metered Gas Control in a Substrate Processing Apparatus
Patent:
5,879,461 →
Application:
09/049,315 →
Kinematic Coupling Compatible Passive Interface Seal
Patent:
6,164,664 →
Application:
09/049,330 →
Evacuation-Driven Smif Pod Purge System
Patent:
5,988,233 →
Application:
09/049,461 →
Programmable Substrate Support for a Substrate Positioning System
Patent:
6,077,026 →
Application:
09/050,321 →
Substrate Transport Apparatus with Coaxial Drive Shafts and Dual Independent Scara Arms
Patent:
6,547,510 →
Application:
09/072,097 →
Method and Apparatus for Vertical Transfer of a Semiconductor Wafer Cassette
Patent:
5,931,631 →
Application:
09/083,834 →
Single Substrate Load Lock with Offset Cool Module and Buffer Chamber
Patent:
6,530,732 →
Application:
09/084,457 →
Dual Plate Gas Assisted Heater Module
Patent:
6,079,928 →
Application:
09/084,754 →
Apparatus and Method for Transporting Substrates
Patent:
6,257,827 →
Application:
09/089,752 →
Volumetric Airflow Indicator and Control Device
Patent:
6,186,744 →
Application:
09/097,561 →
Dual Arm Substrate Handling Robot with a Batch Loader
Patent:
6,450,755 →
Application:
09/113,599 →
Material Handling Device with Overcenter Arms and Method for Use Thereof
Patent:
6,224,319 →
Application:
09/113,784 →
Pod Door Alignment Device
Patent:
6,430,877 →
Application:
09/114,711 →
Pod Door to Port Door Retention System
Patent:
6,502,869 →
Application:
09/115,414 →
Ergonomic, Variable Size, Bottom Opening System Compatible with a Vertical Interface
Patent:
6,220,808 →
Application:
09/115,526 →
Filter Cartridge Assembly
Patent:
6,187,182 →
Application:
09/127,278 →
Pod to Port Door Retention and Evacuation System
Patent:
6,261,044 →
Application:
09/130,254 →
Substrate Transport Apparatus
Patent:
6,464,448 →
Application:
09/145,008 →
Tilt and Go Load Port Interface Alignment System
Patent:
6,138,721 →
Application:
09/145,704 →
Quad Multitran Robot Arm
Application:
09/145,928 →
Device for the Transfer of an Object Between at Least Two Locations
Patent:
6,099,059 →
Application:
09/158,559 →
Safety Device for a Moving System
Method for in-Cassette Wafer Center Determination
Patent:
6,298,280 →
Application:
09/162,334 →
Substrate Transport Apparatus
Patent:
6,960,057 →
Application:
09/163,844 →
Device for Aligning and Coupling at Least a Partial Region Fo a Movable Object to a Destination
Patent:
6,033,175 →
Application:
09/170,557 →
Device for Controlling the Drive of Mechanisms Operating Separately from One Another
Patent:
6,205,881 →
Application:
09/170,575 →
Modular Filter Fan Unit
Patent:
6,050,774 →
Application:
09/172,945 →
Wafer Mapping System
Patent:
6,188,323 →
Application:
09/173,710 →
Docking and Environmental Purging System for Integrated Circuit Wafer Transport Assemblies
Patent:
6,120,371 →
Application:
09/176,476 →
Device for Receiving Transport Containers at a Loading and Unloading Station
Patent:
6,641,348 →
Application:
09/184,561 →
Device and Method for Detecting and Distinguishing Shelf-Forming Supports in Cassettes and Disk-Shaped Objects Deposited Thereon
Automated Door Assembly for Use in Semiconductor Wafer Manufacturing
Patent:
6,106,213 →
Application:
09/185,222 →
Passively Activated Valve for Carrier Purging
Patent:
6,056,026 →
Application:
09/204,320 →
Robot Arm with Specimen Edge Gripping End Effector
Patent:
6,256,555 →
Application:
09/204,747 →
Integrated Material Management Module
Patent:
6,418,352 →
Application:
09/207,957 →
Wafer Carrier Adapter and Method for Use Thereof
Patent:
6,165,268 →
Application:
09/216,011 →
Substrate Transport Apparatus with Multiple Arms on a Common Axis of Rotation
Self-Teaching Robot Arm Position Method
Patent:
6,360,144 →
Application:
09/224,134 →
Semiconductor Wafer Cassette Positioning and Detection Mechanism
Patent:
5,970,621 →
Application:
09/227,177 →
Substrate Transport Apparatus with Double Substrate Holders
Patent:
6,158,941 →
Application:
09/228,305 →
Substrate Carrier as Batchloader
Patent:
6,120,229 →
Application:
09/243,516 →
Reticle Transfer System
Patent:
6,364,595 →
Application:
09/247,695 →
Arrangement for the Detection of Disk -Shaped Objects in a Cassette
Patent:
6,147,356 →
Application:
09/263,618 →
Method of Heating a Substrate with Multiple Selectively Deactuated Heaters
Patent:
6,046,435 →
Application:
09/274,067 →
Hybrid Heater with Ceramic Foil Serrated Plate and Gas Assist
Patent:
6,054,688 →
Application:
09/280,751 →
Robot Arm with Specimen Sensing and Edge Gripping End Effector
Patent:
6,275,748 →
Application:
09/312,343 →
Cassette Buffering Within a Minienvironment
Patent:
6,612,797 →
Application:
09/313,945 →
Corrosion Resistant Exoskeleton Arm Linkage Assembly
Patent:
6,279,412 →
Application:
09/314,654 →
Seal Ring Using Gas Curtain
Patent:
6,352,265 →
Application:
09/318,993 →
System of Trajectory Planining for Robotic Manipulators Based on Pre-Defined Time-Optimum Trajectory Shapes
Patent:
6,216,058 →
Application:
09/322,858 →
Airflow Control Valve for a Clean Room
Patent:
6,192,922 →
Application:
09/323,591 →
Method for Supplying Wafers to an Ic Manufacturing Process
Patent:
6,086,323 →
Application:
09/343,110 →
Universal Tool Interface and/or Workpiece Transfer Apparatus for Smif and Open Pod Applications
Patent:
6,135,698 →
Application:
09/346,166 →
Smif-Compatible Open Cassette Enclosure
Patent:
6,318,953 →
Application:
09/351,986 →
Fims Transport Box Load Interface
Patent:
6,281,516 →
Application:
09/352,155 →
Substrate Processing Apparatus with Vertically Stacked Load Lock and Substrate Transport Robot
Substrate Transfer Chamber Having a Substrate Holder Vertically Aligned with a Substrate Processing Module
Application:
09/362,761 →
System for Aligning Rectangular Wafers
Patent:
6,195,619 →
Application:
09/363,159 →
Load Lock with Vertically Movable Support
Patent:
6,309,161 →
Application:
09/433,260 →
Multi-Level Substrate Processing Apparatus
Patent:
6,261,048 →
Application:
09/435,702 →
Unlimited Rotation Vacuum Isolation Wire Feedthrough
Patent:
6,265,803 →
Application:
09/437,628 →
Wafer Orienting and Reading Mechanism
Patent:
6,478,532 →
Application:
09/452,059 →
Small Footprint Carrier Front End Loader
Patent:
6,364,592 →
Application:
09/452,306 →
System and Method for Cascade Control of Temperature and Humidity for Semi-Conductor Manufacturing Environments
Patent:
6,168,085 →
Application:
09/461,151 →
Integrated Intra-Bay Transfer, Storage, and Delivery System
Patent:
6,468,021 →
Application:
09/461,498 →
Workpiece Handling Robot
Patent:
6,634,851 →
Application:
09/483,625 →
Loading and Unloading Station for Semiconductor Processing Installations
Patent:
6,461,094 →
Application:
09/496,865 →
Loading and unloading station for semiconductor processing installations
Patent:
6,375,403 →
Application:
09/497,057 →
System for Installation, Maintenance and Removal of Minienvironment Components
Patent:
6,709,225 →
Application:
09/507,556 →
Apparatus and Method for Using a Robot to Remove a Substrate Carrier Door
Patent:
6,520,726 →
Application:
09/517,377 →
Person-Guided Vehicle
Patent:
6,454,512 →
Application:
09/527,537 →
Ergonomic Load Port
Patent:
6,409,448 →
Application:
09/541,284 →
System for parallel processing of workpieces
Patent:
6,326,755 →
Application:
09/547,551 →
Modular Sorter
Patent:
6,520,727 →
Application:
09/547,829 →
System and Method for Control and Simulation
Patent:
6,944,584 →
Application:
09/549,268 →
Dual plate gas assisted heater module
Patent:
6,231,289 →
Application:
09/559,720 →
Self Supporting Cable for Use with Linear Motion Devices
Patent:
6,405,843 →
Application:
09/574,127 →
Material transport system
Patent:
6,364,593 →
Application:
09/588,392 →
Periodic Scheduler for Dual-Arm Robots in Cluster Tools with Process-Module Residency Constraints
Patent:
6,418,350 →
Application:
09/592,471 →
Pod Loader Interface End Effectors
Patent:
6,592,317 →
Application:
09/593,245 →
Substrate Handling Robot with a Batch Loader and Individual Vacuum Control at Batch Loader Paddles
Patent:
6,632,065 →
Application:
09/603,295 →
Pod Load Interface Equipment Adapted for Implementation in a Fims System
Patent:
6,501,070 →
Application:
09/612,757 →
Smart Load Port with Integrated Carrier Monitoring and Fab-Wide Carrier Management System
Patent:
6,591,162 →
Application:
09/641,032 →
Automated Door Assembly for Use in Semiconductor Wafer Manufacturing
Patent:
6,447,233 →
Application:
09/641,996 →
Observer-Corrector Control System for Systems with Unmodeled Dynamics
Patent:
6,567,711 →
Application:
09/649,374 →
Fims Interface Without Alignment Pins
Patent:
6,419,438 →
Application:
09/723,629 →
Self Teaching Robot
Wafer Transport System
Device for Controlling the Drive of Mechanisms Operating Separately from One Another
Pellicle Mounting Apparatus
Semiconductor Wafer Imaging System
Self-teaching robot arm position method to compensate for support structure component alignment offset
Reticle Management System
Dual Multitran Robot Arm
Application:
09/863,775 →
Publication:
US 2001/0033788
Intelligent Minienvironment
Automated cassette opening
Application:
09/882,215 →
Publication:
US 2002/0192060
System for Transporting Substrates
Method of Using a Specimen Sensing End Effector to Align a Robot Arm with a Specimen Stored on or in a Container
Patent:
6,453,214 →
Application:
09/890,839 →
Reticle Storage System
Fast Swap Dual Substrate Transport for Load Lock
Substrate Handling End Effector
Reticle Storage and Retrieval System
Smif Load Port Interface Including Smart Port Door
Clean Method for Vacuum Holding of Substrates
Fast Serial Interface Used for Controller to Robot Communications
Method of Using a Specimen Sensing End Effector to Determine the Thickness of a Specimen
Handler for the Transporting of Flat Substrates for Application in the Semi-Conductor Industry
Web Based Tool Control in a Semiconductor Fabrication Facility
Edge Grip Aligner with Buffering Capabilities
Device for Manipulating an Object for Loading and Unloading a Clean Room
Patent:
6,736,582 →
Application:
09/958,504 →
Substrate Processing Apparatus with Independently Configurable Integral Load Locks
Device for Handling Substrates Inside and Outside a Clean Room
Patent:
7,134,825 →
Application:
10/009,218 →
Loading and Unloading Station for Semiconductor Processing Installations
Control system for transfer and buffering
Application:
10/056,158 →
Publication:
US 2002/0164242
Secure Remote Diagnostic Customer Support Network
Semiconductor Material Handling System
Wafer Engine
Patent:
7,066,707 →
Application:
10/087,400 →
Unified Frame for Semiconductor Material Handling System
Device for Handling Flat Panels in a Vacuum
Automatic Jacketing of a Cable
Robot Arm Edge Gripping Device for Handling Substrates Using Two Four-Bar Linkages
Semiconductor Load Port Alignment Device
Robot Arm Edge Gripping Device for Handling Substrates
Dual Arm Substrate Transport Apparatus
Continuous processing automated workstation
Application:
10/179,916 →
Publication:
US 2003/0026732
Integrated System for Tool Front-End Workpiece Handling
Substrate Transport Apparatus with Multiple Independent End Effectors
Centering double side edge grip end effector with integrated mapping sensor
Application:
10/196,679 →
Publication:
US 2003/0035711
Trajectory Planning and Motion Control Strategies for a Planar Three-Degree-of-Freedom Robotic Arm
Substrate Loading and Unloading Station with Buffer
Robotic hand with multi-wafer end effector
Application:
10/202,401 →
Publication:
US 2004/0013503
Method of Using a Specimen Sensing End Effector to Determine Angular Orientation of a Specimen
Modular Frame for a Wafer Fabrication System
Universal Modular Wafer Transport System
Method of Removing Substrates from a Storage Site and a Multiple Substrate Batch Loader
Person-guided vehicle
Application:
10/253,735 →
Publication:
US 2003/0077161
Substrate Alignment System
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Apparatus for Alignment and Orientation of a Wafer for Processing
Device for Positioning Disk-Shaped Objects
Device and Method for Cleaning Articles Used in the Production of Semiconductor Components
Semiconductor Processing Tool Alignment Technique Implemented in a Fims System
Specimen Scanning Mechanism Adapted for Implementation in a Fims System
Detection of Motive Force Applied to Transport Box Mounted on a Fims System
Wafer Shipping Container
Substrate Cassette Mapper
Dual Arm Robot
Pre-Aligner
Edge Grip Aligner with Buffering Capabilities
Loading and Unloading Station for Semiconductor Processing Installations
Semiconductor Wafer Having an Edge Based Identification Feature
Mobile transponder reader
Application:
10/489,627 →
Publication:
US 2004/0267545
Controlling device for monitoring the spatial or mechanical delimitation of producer goods or materials in the production cycle by using of transponder technology
Application:
10/509,664 →
Publication:
US 2005/0177272
Substrate Apparatus Calibration and Synchronization Procedure
Data collection and diagnostic system for a semiconductor fabrication facility
Application:
10/618,313 →
Publication:
US 2005/0010311
Method and Apparatus for Locating/Sizing Contaminants on a Polished Planar Surface of a Dielectric or Semiconductor Material
Bi-directional arm and storage system
Application:
10/622,261 →
Publication:
US 2004/0191032
Substrate Loading and Uploading Station with Buffer
Active Edge Gripping End Effector
Substrate Processing Apparatus
Robot End Effector Position Error Correction Using Auto-Teach Methodology
Manipulating Device for Photomasks That Provides Possibilities for Cleaning and Inspection of Photomasks
Reticle Manipulating Device
Reticle Tracking and Cleaning
Specimen Sensing and Edge Gripping End Effector
Device and Process for Reading Out Identification Information on Reticles
Device for the Detection of Substrates Stacked with a Specific Spacing
Distributed control system architecture and method for a material transport system
Application:
10/719,069 →
Publication:
US 2004/0111339
System and Method for on-the-Fly Eccentricity Recognition
Three-Degree-Of-Freedom Parallel Robot Arm
Ultra Low Contact Area End Effector
Multi-Axial Positioning Mechanism for a Fims System Port Door
Method and apparatus for semiconductor processing
Application:
10/927,703 →
Publication:
US 2005/0194096
Linear Substrate Transport Apparatus
Method for cleaning reaction vessels in place
Application:
10/975,824 →
Publication:
US 2005/0170512
Methods and Systems for Handling a Workpiece in Vacuum-Based Material Handling System
Methods and systems for driving robotic components of a semiconductor handling system
Application:
10/985,730 →
Publication:
US 2005/0223837
Mid-Entry Load Lock for Semiconductor Handling System
Stacked Process Modules for a Semiconductor Handling System
Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
Application:
10/985,843 →
Publication:
US 2005/0111956
Sensor methods and systems for semiconductor handling
Application:
10/985,844 →
Publication:
US 2005/0113964
Software controller for handling system
Application:
10/985,846 →
Publication:
US 2005/0113976
Active Edge Grip Rest Pad
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Reduced cost process modules
Application:
11/070,443 →
Publication:
US 2006/0196023
High Speed Substrate Aligner Apparatus
Transfer Chamber Between Workstations
Substrate Transport Apparatus with Active Edge Gripper
Fast Swap Dual Substrate Transport for Load Lock
Method of Determining Axial Alignment of the Centroid of an Edge Gripping End Effector and the Center of a Specimen Gripped by It
Dual Scara Arm
Subtrate Processing Apparatus with Removable Component Module
Nonproductive Wafer Buffer Module for Substrate Processing Apparatus
Scalable Motion Control System
Substrate transport apparatus
Load port module
High Speed Substrate Aligner Apparatus
Unequal Link Scara Arm
Substrate Apparatus Calibration and Synchronization Procedure
Reduced Capacity Carrier and Method of Use
Elevator-Based Tool Loading and Buffering System
Transportation system
Application:
11/211,236 →
Publication:
US 2006/0104712
End Effector with Centering Grip
Method and Apparatus for Cleaning Articles Used in the Production of Semiconductors
Chain driven positioning device methods and systems
Application:
11/301,653 →
Publication:
US 2007/0144421
Robotics Programming Interface
Wafer Engine
Unified frame for semiconductor material handling system
Application:
11/352,154 →
Publication:
US 2006/0177289
Linear Semiconductor Processing Facilities
Web-based robotics simulation
Application:
11/386,446 →
Publication:
US 2007/0135933
Ultra Low Contact Area End Effector
Substrate processing apparatus
Application:
11/441,711 →
Publication:
US 2007/0183871
Substrate Processing Apparatus
Linearly Distributed Semiconductor Workpiece Processing Tool
Extended Read Range Rfid System
A Substrate Alignment Apparatus Comprising a Controller to Measure Alignment During Transport
Workpiece support structures and apparatus for accessing same
Application:
11/483,366 →
Publication:
US 2007/0029227
Intelligent Condition-Monitoring and Fault Diagnostic System for Predictive Maintenance
Process Apparatus with on-the-Fly Workpiece Centering
Equipment Storage for Substrate Processing Apparatus
Substrate Transport Apparatus with Automated Alignment
Apparatus and Methods for Transporting and Processing Substrates
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Application:
11/556,584 →
Publication:
US 2007/0201967
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Load port door with simplified FOUP door sensing and retaining mechanism
Application:
11/599,020 →
Publication:
US 2008/0112784
Loader and buffer for reduced lot size
Semiconductor Wafer Handling and Transport
Application:
11/679,829 →
Publication:
US 2007/0269297
Robotic Components for Semiconductor Manufacturing
Application:
11/681,809 →
Publication:
US 2007/0264106
Bypass Thermal Adjuster for Vacuum Semiconductor Processing
Semiconductor Manufacturing Process Modules
Application:
11/681,978 →
Publication:
US 2007/0286710
Wafer Center Finding
Substrate Transport Apparatus with Multiple Independently Movable Articulated Arms
Inertial Wafer Centering End Effector and Transport Apparatus
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/743,105 →
Publication:
US 2007/0282480
Reduced-Complexity Self-Bearing Brushless Dc Motor
Commutation of an Electromagnetic Propulsion and Guidance System
Variable Lot Size Load Port
Variable Lot Size Load Port
Application:
11/774,760 →
Publication:
US 2008/0031709
Variable Lot Size Load Port
Bridge Loadport and Method
Application:
11/774,928 →
Publication:
US 2008/0008570
Reduced capacity carrier, transport, load port, buffer system
Application:
11/787,981 →
Publication:
US 2008/0107507
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Workpiece Stocker with Circular Configuration
Linear Semiconductor Processing Facilities
Compact Processing Apparatus
Carrier Gas System and Coupling Substrate Carrier to a Loadport
Integrated Wafer Transfer Mechanism
Simultaneous Wafer Id Reading
Transfer Mechanism with Multiple Wafer Handling Capability
Ultra Low Contact Area End Effector
Semiconductor Manufacturing Process Modules
Application:
11/876,854 →
Publication:
US 2008/0124193
Semiconductor Manufacturing Process Modules
Application:
11/876,860 →
Publication:
US 2008/0219806
Semiconductor Manufacturing Process Modules
Application:
11/876,865 →
Publication:
US 2008/0219807
Semiconductor Manufacturing Process Modules
Semiconductor Manufacturing Process Modules
Semiconductor Manufacturing Process Modules
Application:
11/876,886 →
Publication:
US 2008/0219810
Semiconductor Manufacturing Process Modules
Application:
11/876,887 →
Publication:
US 2008/0219811
Semiconductor Manufacturing Process Modules
Semiconductor Manufacturing Process Modules
Semiconductor Manufacturing Process Modules
Application:
11/876,904 →
Publication:
US 2008/0124195
Semiconductor Manufacturing Process Modules
Application:
11/876,910 →
Publication:
US 2008/0124196
Semiconductor Manufacturing Process Modules
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/877,153 →
Publication:
US 2008/0134075
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/877,170 →
Publication:
US 2008/0155444
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/877,264 →
Publication:
US 2008/0163096
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/877,279 →
Publication:
US 2008/0167890
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/877,294 →
Publication:
US 2008/0134076
Methods and Systems for Controlling a Semiconductor Fabrication Process
Removable compartments for workpiece stocker
Application:
11/881,086 →
Publication:
US 2008/0112787
Removable compartments for workpiece stocker
Application:
11/881,087 →
Publication:
US 2009/0028669
Integrated Gripper for Workpiece Transfer
Redundantable robot assembly for workpiece transfer
Redundantable Robot Assembly for Workpiece Transfer
Method for Operating Equipment Using Buffer Station Having Emergency Access
Buffer station for stocker system
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Scalable Motion Control System
Application:
11/917,117 →
Method and Apparatus for Semiconductor Processing
Application:
11/929,230 →
Publication:
US 2008/0073031
A Method and Apparatus for Semiconductor Processing
Universal Modular Wafer Transport System
Semiconductor Wafer Handling and Transport
Semiconductor Wafer Handling and Transport
Semiconductor Wafer Handling and Transport
Semiconductor Wafer Handling and Transport
Application:
12/025,582 →
Publication:
US 2008/0232948
Automatic handling buffer for bare stocker
Scalable Stocker with Automatic Handling Buffer
Multi-Function Vacuum Link
Application:
12/030,707 →
Publication:
US 2008/0226429
Particle-Reducing Load Lock Seal
Application:
12/030,736 →
Publication:
US 2008/0131238
Robotic Chamber Support Pedestal
Application:
12/030,897 →
Publication:
US 2008/0232933
Batch Wafer Alignment
Semiconductor Manufacturing Process Modules
Application:
12/030,922 →
Publication:
US 2008/0145192
Wafer Center Finding
Sensor Arrangements for Wafer Center Finding
Application:
12/032,405 →
Publication:
US 2008/0145194
Wafer Center Finding with a Kalman Filter
Application:
12/032,436 →
Publication:
US 2008/0255798
Wafer Center Finding with Contact Image Sensors
Application:
12/032,463 →
Publication:
US 2008/0135788
Wafer Center Finding with Charge-Coupled Devices
Scheduling with Neural Networks and State Machines
Application:
12/032,567 →
Publication:
US 2008/0208372
Applications of Neural Networks
Linear Wafer Drive for Handling Wafers During Semiconductor Fabrication
Clean transfer robot
Apparatus for Storing Contamination-Sensitive Flat Articles, in Particular for Storing Semiconductor Wafers
Facet Adapter for a Wafer Handler
Application:
12/104,193 →
Publication:
US 2008/0260499
Batch Substrate Handling
Substrate Transport Apparatus
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
Compact Substrate Transport System
Load Lock Fast Pump Vent
Side Opening Unified Pod
Vacuum Substrate Storage
Method and Apparatus for Wafer Marking
Fast Swap Dual Substrate Transport for Load Lock
Multiple Dimension Position Sensor
Sensor for Simultaneous Position and Gap Measurement
Position Sensor System
Motor Stator with Lift Capability and Reduced Cogging Characteristics
Robot Drive with Magnetic Spindle Bearings
Substrate Processing Apparatus with Motors Integral to Chamber Walls
Variable-Size Load Port and Method for Operating the Same
Application:
12/184,194 →
Publication:
US 2010/0028111
Wafer Presence Detector with End Effectors Having Optical Couplers and Fibers
Stacked Process Modules for a Semiconductor Handling System
Semiconductor Manufacturing Systems
End Effector with Sensing Capabilities
Application:
12/244,693 →
Publication:
US 2009/0092470
Method and Apparatus for Wafer Support
Application:
12/253,212 →
Publication:
US 2009/0101067
Mid-Entry Load Lock for Semiconductor Handling System
Apparatus and Methods for Transporting and Processing Substrates
Substrate Processing Apparatus
Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers
Application:
12/348,276 →
Publication:
US 2009/0175707
Apparatus and Methods for Transporting and Processing Substrates
Apparatus for Storage of Objects from the Field of Manufacture of Electronic Components
End Effector to Substrate Offset Detection and Correction
Application:
12/432,359 →
Publication:
US 2010/0034621
Substrate Container Sealing via Movable Magnets
Substrate Alignment System
Transfer Device for an Overhead Conveying System
Application:
12/516,261 →
Publication:
US 2010/0183420
Substrate Processing Apparatus
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Manipulator Auo-Teach and Position Correction System
Substrate Loading and Unloading Station with Buffer
Reticle Manipulation Device
Method and Apparatus for Semiconductor Processing
Application:
12/776,235 →
Publication:
US 2010/0221915
Substrate Container Storage System
Integrated Systems for Interfacing with Substrate Container Storage Systems
Integrated cleaner and dryer system
Integrated Handling System for Semiconductor Articles
Port Door Positioning Apparatus and Associated Methods
Equipment Storage for Substrate Processing Apparatus
Linear Vacuum Robot with Z Motion and Articulated Arm
Wafer Center Finding with a Kalman Filter
Reduced Capacity Carrier, Transport Load Port, Buffer System
Application:
12/886,301 →
Publication:
US 2011/0008136
Elevator-Based Tool Loading and Buffering System
Position Feedback for Self Bearing Motor
Universal Modular Wafer Transport System
Wafer Center Finding with Charge-Coupled Devices
Workpiece stocker with circular configuration
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Scalable Motion Control System
Stackable substrate carriers
Dual Arm Robot
High Speed Substrate Aligner Apparatus
Robot Edge Contact Gripper
Apparatus and Methods for Transporting and Processing Substrates
Methods and apparatuses for roll-on coating.
Methods and apparatuses for roll-on coating
Substrate Transport Apparatus with Multiple Independently Movable Articulated Arms
Removable Compartments for Workpiece Stocker
Linear Semiconductor Processing Facilities
Substrate Processing Apparatus
Substrate Processing Apparatus
Methods and apparatuses for roll-on coating
Substrate Processing Apparatus with Motors Integral to Chamber Walls
Container storage add-on for bare workpiece stocker
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Semiconductor Manufacturing Systems
Stacked Process Modules for a Semiconductor Handling System
Coaxial Drive Vacuum Robot
Scalable Stockers with Automatic Handling Buffer
Linear Vacuum Robot with Z Motion and Articulated Arm
Dual Arm Robot
Workpiece Handling Modules
Workpiece Support Structures and Apparatus for Accessing Same
Substrate Apparatus Calibration and Synchronization Procedure
Wafer Center Finding with Charge-Coupled Devices
Multiple Dimension Position Sensor
Substrate Processing Apparatus
Substrate Transport Apparatus with Active Edge Gripper
Method and Apparatus for Wafer Support
Application:
13/436,304 →
Publication:
US 2012/0189408
Horizontal Displacement Mechanism for Cleanroom Material Transfer Systems
Narrow Width Loadport Mechanism for Cleanroom Material Transfer Systems
Dynamic Storage and Transfer System Integrated with Autonomous Guided/Roving Vehicle
Semiconductor Cleaner Systems and Methods
Semiconductor Cleaner Systems and Methods
Semiconductor Cleaner Systems and Methods
Semiconductor Cleaner Systems and Methods
Semiconductor cleaner systems and methods
Semiconductor Stocker Systems and Methods
Semiconductor stocker systems and methods
A Robot with Gas Flow Sensor Coupled to Robot Arm
Semiconductor Stocker Systems And Methods
Compact Direct Drive Spindle
Simultaneous wafer ID reading
Fast Swap Dual Substrate Transport for Load Lock
Substrate Processing Apparatus with Motors Integral to Chamber Walls
Access Arbitration Module and System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same
Semiconductor Manufacturing Process Module
Substrate Transport Apparatus
Wafer Center Finding with Kalman Filter
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Load Lock Fast Pump Vent
Transfer mechanism with multiple wafer handling capability
Robot Drive with Magnetic Spindle Bearings
Transport System
Inventory Monitoring of Live-Storage Systems by Means of Rfid
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Integrated Gripper for Workpiece Transfer
Patent:
8,651,539 →
Application:
13/740,257 →
Substrate Processing Apparatus
Dual Scara Arm
Tray Engine with Slide Attached to an End Effector Base
Linear Vacuum Robot with Z Motion and Articulated Arm
Substrate carrier having drip edge configurations
Substrate Loading and Unloading Station with Buffer
Manipulator Auto-Teach and Position Correction System
Semiconductor Manufacturing Systems
High Speed Substrate Aligner Apparatus
Compact Substrate Transport System
Substrate Transport Apparatus
Integrated Cleaner and Dryer System
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Substrate Transport Apparatus with Active Edge Gripper
Wafer Center Finding with Kalman Filter
Substrate Transport
Substrate Processing Apparatus
Integrated gripper for workpiece transfer
Load Lock Chamber
Semiconductor Wafer Handling Transport
Tool compiler
Elevator-Based Tool Loading and Buffering System
Semiconductor cleaner systems and methods
Methods and apparatuses for roll-on coating
Application:
14/274,679 →
Publication:
US 2014/0261164
Methods and apparatuses for roll-on coating
Application:
14/274,771 →
Publication:
US 2014/0295092
Methods and apparatuses for roll-on coating
Application:
14/294,141 →
Publication:
US 2014/0259498
Removable compartments for workpiece stocker
Removable compartments for workpiece stocker
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
Clean Transfer Robot
Scalable Stockers with Automatic Handling Buffer
Process Apparatus with on-the-Fly Substrate Centering
Time-Optimal Trajectories for Robotic Transfer Devices
Load Station
Semiconductor Wafer Handling and Transport
Transport Apparatus
Substrate Processing Apparatus
Methods and apparatuses for roll-on coating
Application:
14/451,422 →
Publication:
US 2014/0356546
Workpiece Structures and Apparatus for Accessing Same
Substrate Transport Apparatus
Load Port Module
Buffer Station for Stocker System
Port Door Positioning Apparatus and Associated Methods
Container storage add-on for bare workpiece stocker
Cleaning Systems and Methods for Semiconductor Substrate Storage Articles
Application:
14/517,900 →
Publication:
US 2016/0303622
Access Arbitration System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same
Integrated Systems for Interfacing with Substrate Container Storage Systems
Sealed Switched Reluctance Motor
Position Feedback for Sealed Environments
Sealed Robot Drive
Method and Apparatus for Brushless Electrical Machine Control
Reduced Capacity Carrier and Method of Use
Substrate Transport Apparatus
Recirculation Substrate Container Purging Systems and Methods
Substrate Processing Apparatus
Stacked Process Modules for a Semiconductor Handling System
Application:
14/611,697 →
Publication:
US 2015/0221534
Dual Arm Robot
Semiconductor cleaner systems and methods
Scalable Motion Control System
Substrate Carrier Having Drip Edge Configurations
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Side Opening Unified Pod
Redundantable Robot Assembly for Workpiece Transfer
Dual Scara Arm
Wafer Aligner
Tool Auto-Teach Method and Apparatus
Compact Direct Drive Spindle
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Substrate Processing Apparatus
Unequal Link Scara Arm
Cleaning Systems and Methods for Semiconductor Substrate Storage Articles
Recirculation Substrate Container Purging Systems
Processing Apparatus
Substrate Transport Apparatus
Substrate Transport Apparatus
Workpiece Handling Modules
On the Fly Automatic Wafer Centering Method and Apparatus
Substrate Processing Apparatus
Application:
15/215,143 →
Publication:
US 2016/0329234
Semiconductor Cleaner Systems and Methods
Load Lock Fast Pump Vent
Process Apparatus with on-the-Fly Substrate Centering
Time-Optimal Trajectories for Robotic Transfer Devices
Semiconductor Stocker Systems and Methods
Wafer Tray Sorter with Door Coupled to Detector
High Speed Substrate Aligner Apparatus
Dual Arm Robot
Automatic Handling Buffer for Bare Stocker
Inspection System
Collaborative Robot
Substrate Processing Apparatus
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Collaborative Robot
Patent:
10,029,369 →
Application:
15/682,632 →
Substrate Processing Apparatus
Compact Direct Drive Spindle
Substrate Transport Apparatus
Substrate Transport Apparatus with Interchangeable Motor Modules
Humidity Control in Semiconductor Systems
Integrated Systems for Interfacing with Substrate Container Storage Systems
Substrate Processing Apparatus
Semiconductor Wafer Handling and Transport
Workpiece Support Structures and Apparatus for Accessing Same
Method and Apparatus for Substrate Transport Apparatus Position Compensation
Tool Compiler
Method and Apparatus for Substrate Transport
Application:
15/889,811 →
Publication:
US 2018/0308728
Sealed Robot Drive
Workpiece Stocker with Circular Configuration
Method and Apparatus for Health Assessment of a Transport Apparatus
Collaborative Robot
Side Opening Unified Pod
Tool Auto-Teach Method and Apparatus
Semiconductor Process Transport Apparatus Comprising an Adapter Pendant
Semiconductor Cleaner Systems and Methods
Dual Arm Robot
Semiconductor Cleaner Systems and Methods
Application:
16/057,480 →
Publication:
US 2018/0350589
Time-Optimal Trajectories for Robotic Transfer Devices
End Effector with Slides for Transferring Trays
Cleaning Systems and Methods for Semiconductor Substrate Storage Articles
Substrate Transport Apparatus
Semiconductor Stocker Systems and Methods
Substrate Transport Apparatus with Independent Accessory Feedthrough
Semiconductor Cleaner Systems and Methods
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
On the Fly Automatic Wafer Centering Method and Apparatus
Substrate Transport Apparatus
Transport Apparatus
Dual Scara Arm
Automatic Wafer Centering Method and Apparatus
Substrate Transport Apparatus
Method for Cleaning a Synthetic Surface
Reticle Compartment and Diffusor Plate
Substrate Transport Apparatus
Semiconductor Wafer Handling and Transport
Substrate Processing Apparatus
Substrate Processing Apparatus
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
Sealed Switched Reluctance Motor
Tool Auto-Teach Method and Apparatus
Substrate Transport
Unequal Link Scara Arm
Application:
16/566,730 →
Publication:
US 2020/0001451
Method and Apparatus for Substrate Alignment
Substrate Processing Apparatus
Method for Controlling a Plc Using a Pc Program
Inspection System and Method of Inspection for Substrate Containers
Method for Inspecting a Container and Inspection System
Semiconductor Stocker Systems and Methods
Tool Compiler
Transport Apparatus with Linear Bearing
Sealed Robot Drive
Load Port Module
Load Port Module
Scalable Motion Control System
Application:
16/696,822 →
Publication:
US 2020/0166913
Compact Direct Drive Spindle
Load Lock Fast Pump Vent
Container Storage Add-on for Bare Workpiece Stocker
Transport Apparatus
Method and Apparatus for Brushless Electrical Machine Control
Inspection System
Substrate Processing Apparatus
Position Feedback for Sealed Environments
Method and Apparatus for Substrate Transport Apparatus Position Compensation
Substrate Process Apparatus
Application:
16/899,151 →
Publication:
US 2020/0395232
Reticle Compartment and Diffusor Plate
Robot Embedded Vision Apparatus
Dual Arm Robot
Automatic Handling Buffer for Bare Stocker
Substrate Transport Apparatus
Wafer Aligner
Tool Auto-Teach Method and Apparatus
Substrate Transport Apparatus
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Method and Apparatus for Health Assessment of a Transport Apparatus
Load Lock Fast Pump Vent
Substrate Processing Apparatus
Process Apparatus with on-the-Fly Substrate Centering
Substrate Transport Apparatus
Transport Apparatus and Adapter Pendant
Dual Scara Arm
Application:
17/158,723 →
Publication:
US 2021/0225678
Substrate Processing Apparatus
Load Port Module
Substrate Process Apparatus
On the Fly Automatic Wafer Centering Method and Apparatus
Load Port Module
Automated Teach Apparatus for Robotic Systems and Method Therefor
Substrate Mapping Apparatus and Method Therefor
Container Storage Add-on for Bare Workpiece Stocker
Tray Engine and Methods for Transferring Trays to and From Tools and in Sorters
Application:
17/382,858 →
Publication:
US 2021/0346915
Automatic Wafer Centering Method and Apparatus
Enclosure for Electrical Equipment
Patent:
425,493 →
Application:
29/101,461 →
Kinematic Coupling Nest Switch
Application:
60/071,299 →
Automated Door Assembly for Use in Semiconductor Wafer Manufacturing
Application:
60/076,223 →
Apparatus and Method for Using a Robot to Remove a Substrate Carrier Door
Application:
60/122,673 →
Person-Guided Vehicle
Application:
60/125,023 →
Universal Tool Interface and/or Workpiece Transfer Apparatus for Smif and Open Pod Applications
Application:
60/131,758 →
Ultracapacitor Use in an Electric Vehicle
Application:
60/138,714 →
Apparatus and Method for Using a Robot to Remove a Substrate Carrier Door
Application:
60/142,000 →
Reticle management system
Application:
60/199,453 →
Web based tool control
Application:
60/227,408 →
Control system for transfer and buffering
Application:
60/264,557 →
Customer support network
Application:
60/269,084 →
Edge gripper for 300mm wafer handling
Application:
60/283,513 →
Edge gripper for 300MM wafer handling
Application:
60/283,521 →
Semiconductor 300mm load port alignment tool
Application:
60/284,396 →
Substrate transport apparatus with multiple independent end effectors
Application:
60/305,052 →
Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
Application:
60/305,177 →
Centering double side edge grip end effector w/integrated mapping sensor
Application:
60/305,384 →
Universal modular processing interface system
Application:
60/316,722 →
Dual arm robot
Application:
60/378,983 →
Multiple end effector, jointed arm configurable robot manipulator system
Application:
60/379,063 →
Dual end effector multiple link configurable robot manipulator system
Application:
60/379,095 →
Pre-aligner light source
Application:
60/380,993 →
Substrate processing apparatus
Application:
60/397,895 →
Offset zero footprint storage (ZFS) using moving shelves or a translating hoist platform
Application:
60/417,993 →
Method for on-the-fly eccentricity recognition for a circular substrate on a robot end-effector
Application:
60/435,552 →
Three-degree-of-freedom parallel robot arm
Application:
60/435,556 →
Ultra low contact area end effector
Application:
60/486,330 →
Method for cleaning reaction vessels in place
Application:
60/515,235 →
Methods and systems for semiconductor manufacturing
Application:
60/518,823 →
Adjustable butterfly dual scara arm
Application:
60/578,571 →
Substrate processing apparatus with removable component module
Application:
60/579,862 →
Non productive wafer buffer module for a sorter - EFM module
Application:
60/583,497 →
Reduced capacity carrier and method of use
Application:
60/603,361 →
Methods and systems for semiconductor manufacturing
Application:
60/607,649 →
Scalable motion control system
Application:
60/688,636 →
End effector wafer support and transfer methods
Application:
60/697,528 →
Modular terminal for high throughput AMHS
Application:
60/697,785 →
Equipment storage for substrate processing apparatus
Application:
60/698,222 →
Substrate transport apparatus with automated alignment
Application:
60/698,223 →
Intelligent condition-monitoring and fault diagnostic system for robotized manufacturing tools
Application:
60/698,521 →
Process apparatus with on-the-fly workpiece centering
Application:
60/698,536 →
Reduced capacity carrier, transport, load port, buffer system
Application:
60/733,813 →
Information Handling
Application:
60/746,163 →
Robotic components for semiconductor manufacturing
Application:
60/779,463 →
Modules for vacuum semiconductor wafer processing
Application:
60/779,478 →
Wafer center finding
Application:
60/779,609 →
Reduced capacity carrier, transport, load port, buffer system
Application:
60/794,047 →
Reduced capacity carrier, transport, load port, buffer system
Application:
60/799,908 →
Information Handling - Wafer-Centric Throughput Methods
Application:
60/807,189 →
Variable lot size load port
Application:
60/819,602 →
Bridge load port with variable lot size capability
Application:
60/819,603 →
Carrier Gas System and Coupling Substrate Carrier to a Loadport
Application:
60/825,704 →
Buffer station for stocker system
Application:
60/838,594 →
Reduced capacity carrier, transport, load port, buffer system
Application:
60/838,906 →
Compact processing apparatus
Application:
60/841,399 →
Redundantable robot assembly for workpiece transfer
Application:
60/849,997 →
Integrated gripper for workpiece transfer
Application:
60/859,200 →
Removable compartments for workpiece stocker
Application:
60/859,201 →
Workpiece stocker with circular configuration
Application:
60/859,202 →
Handling, transferring and isolation system for flat panel displays
Application:
60/906,972 →
Semimconductor Process Module Adapter
Application:
60/912,137 →
Batch End Effector
Application:
60/913,257 →
Substrate Transport Apparatus
Application:
60/916,724 →
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
Application:
60/916,781 →
Side opening substrate carrier and load port
Application:
60/930,634 →
Compact Substrate Transport System With Fast Swap Robot
Application:
60/938,913 →
Load Lock Fast Pump Vent
Application:
60/938,922 →
Vacuum Substrate Storage
Application:
60/940,811 →
Method and Apparatus for Wafer Marking
Application:
60/945,847 →
Multiple Dimension Position Sensor
Application:
60/946,542 →
Sensor for Position and Gap Measurement
Application:
60/946,547 →
Position Feedback for Self Bearing Motor
Application:
60/946,686 →
Robot Drive with Magnetic Spindle Bearings
Application:
60/946,687 →
Motor Stator with Lift Capability and Reduced Cogging Characteristics
Application:
60/946,693 →
Substrate Processing Apparatus with Motors Integral to Chamber Walls
Application:
60/950,331 →
Multi-Wafer Centering
Application:
60/956,834 →
Adjustable Wafer Carrier
Application:
60/957,144 →
Wafer Presence Detection
Application:
60/957,406 →
Environmental Isolation System for Flat Panel Displays
Application:
60/969,570 →
Robotic Components for Semiconductor Manufacturing
Application:
60/975,350 →
End Effector with Sensing Capabilities
Application:
60/977,357 →
Method and Apparatus for Wafer Support
Application:
60/980,763 →
Method and Appartatus for Wafer Support
Application:
60/983,110 →
Controlled Deflection of Large Area Semiconductor Substrates for Shipping and Manufacturing Containers
Application:
61/018,782 →
Side Opening Substrate Carrier and Load Port
Application:
61/024,152 →
Side Opening Substrate Carrier and Load Port
Application:
61/043,097 →
End Effector Having Sensing Capability
Application:
61/049,387 →
Wafer Handling Systems
Application:
61/049,440 →
Wafer Handling Systems
Application:
61/057,170 →
Horizontal recirculating storage system for substrate containers
Application:
61/216,570 →
Integrated cleaner and drier system
Application:
61/218,067 →
Linear Vacuum Robot with Z Motion and Articulated Arm
Application:
61/259,928 →
Manipulator auto-teach and position correction system
Application:
61/281,188 →
Stackable Substrate Carriers
Application:
61/305,567 →
Robot Edge Contact Gripper
Application:
61/308,449 →
Horizontal Recirculating Storage System for Substrate Containers
Application:
61/332,802 →
Coaxial Harmonic Drive Vacuum Robot
Application:
61/391,380 →
Substrate Processing Tool
Application:
61/412,218 →
Workpiece Handling System
Application:
61/426,138 →
Substrate Processing Tool
Application:
61/451,912 →
Horizontal Displacement Mechanism for Cleanroom Material Transfer Systems
Application:
61/481,062 →
Narrow Width Loadport Mechanism for Cleanroom Material Transfer Systems
Application:
61/483,642 →
Dynamic Storage and Transfer System Integrated with Autonomous Guided/Roving Vehicle
Application:
61/488,120 →
Coaxial Harmonic Drive Vacuum Robot
Application:
61/490,864 →
Semiconductor cleaner systems and methods
Application:
61/500,608 →
Semiconductor stocker systems and methods
Application:
61/501,792 →
Compact Direct Drive Spindle
Application:
61/507,276 →
Compact Direct Drive Spnidle
Application:
61/510,819 →
Time-Optimal Trajectories for Robotic Transfer Devices
Application:
61/530,651 →
Load Station
Application:
61/534,681 →
Semiconductor Wafer Handling and Transport
Application:
61/551,779 →
Processing Apparatus
Application:
61/566,443 →
Transport Apparatus
Application:
61/576,450 →
Substrate Processing Apparatus
Application:
61/597,507 →
Substrate carrier having drip edge configurations
Application:
61/625,083 →
Substrate Processing Apparatus
Application:
61/660,900 →
Substrate Processing Apparatus
Application:
61/662,690 →
Substrate Transport
Application:
61/755,156 →
Tool compiler
Application:
61/803,427 →
Process Apparatus with on-the-Fly Substrate Centering
Application:
61/843,685 →
Substrate Transport Apparatus
Application:
61/869,870 →
Processing Apparatus
Application:
61/892,849 →
Position Feedback for Sealed Environments
Application:
61/903,726 →
Method and Apparatus for Brushless Electrical Machine Control
Application:
61/903,745 →
Sealed Switched Reluctance Motor
Application:
61/903,792 →
Sealed Robot Drive
Application:
61/903,813 →
Processing Apparatus
Application:
61/904,908 →
Recirculation substrate container purging systems and methods
Application:
61/916,071 →
Substrate Transport Apparatus
Application:
61/917,056 →
Substrate Transport Apparatus
Application:
61/928,681 →
Substrate Transport Apparatus
Application:
61/932,538 →
Wafer Aligner
Application:
62/075,014 →
Tool Auto-Teach Method and Apparatus
Application:
62/077,775 →
Tool Auto-Teach Method and Apparatus
Application:
62/078,345 →
Tool Auto-Teach Method and Apparatus
Application:
62/191,829 →
Substrate Transport Apparatus
Application:
62/191,836 →
On the Fly Automatic Wafer Centering Method and Apparatus
Application:
62/191,863 →
Tool Auto-Teach Method and Apparatus
Application:
62/247,647 →
On the Fly Automatic Wafer Centering Method and Apparatus
Application:
62/320,142 →
Substrate Processing Apparatus
Application:
62/361,325 →
Substrate Processing Apparatus
Application:
62/385,150 →
Method and Apparatus for Substrate Transport Apparatus Position Compensation
Application:
62/450,818 →
Method and Apparatus for Substrate Transport
Application:
62/455,874 →
Method and Apparatus for Health Assessment of a Transport Apparatus
Application:
62/502,292 →
Transport Apparatus and Adapter Pendant
Application:
62/531,218 →
Substrate Transport Apparatus with Independent Accessory Feedthrough
Application:
62/568,541 →
Automatic Wafer Centering Method and Apparatus
Application:
62/623,843 →
Substrate Transport Apparatus
Application:
62/644,053 →
Substrate Processing Apparatus
Application:
62/678,963 →
Substrate Processing Apparatus
Application:
62/742,000 →
Transport Apparatus with Linear Bearing and Method Therefor
Application:
62/754,465 →
Load Port Module
Application:
62/772,376 →
Load Port Module
Application:
62/772,481 →
Substrate Process Apparatus
Application:
62/861,543 →
Robot Embedded Vision Apparatus
Application:
62/880,521 →
Substrate Processing Apparatus
Application:
62/942,530 →
Substrate Processing Apparatus
Application:
62/942,544 →
Substrate Transport Apparatus
Application:
62/964,817 →
Substrate Processing Apparatus
Application:
62/970,565 →
Substrate Processing Apparatus
Application:
62/979,195 →
Automated Teach Apparatus For Robotic Systems And Method Therefor
Application:
63/046,289 →
Substrate Mapping Apparatus And Method Therefor
Application:
63/046,555 →
Substrate Processing Apparatus
Application:
63/081,186 →
Intelligent Wafer Carrier
Application:
90/008,245 →
Related Assignments
(6)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 9, 2021
From: BROOKS AUTOMATION HOLDING, LLC
To: BROOKS AUTOMATION US, LLC
Reel/Frame 058482/0001 →
Assignment of Assignor's Interest
Feb 2, 2022
From: BLUESHIFT TECHNOLOGIES, INC
To: BROOKS AUTOMATION, INC
Reel/Frame 058866/0217 →
Second Lien Patent Security Agreement
Feb 2, 2022
From: BROOKS AUTOMATION US, LLC
To: GOLDMAN SACHS BANK USA
Reel/Frame 058945/0748 →
First Lien Patent Security Agreement
Feb 2, 2022
From: BROOKS AUTOMATION US, LLC
To: BARCLAYS BANK PLC
Reel/Frame 058950/0146 →
Release of Security Interest Recorded at Reel/Frame 038891/0765
Nov 4, 2025
From: WELLS FARGO BANK, NATIONAL ASSOCIATION
To: AZENTA, INC. (F/K/A BROOKS AUTOMATION, INC.); AZENTA USA, INC. (F/K/A BIOSTORAGE TECHNOLOGIES, INC.)
Reel/Frame 073446/0080 →
Release of Security Interest Recorded at Reel/Frame 044142/0258
Nov 4, 2025
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: AZENTA, INC. (F/K/A BROOKS AUTOMATION, INC.); AZENTA US, INC. (F/K/A BROOKS LIFE SCIENCES, INC., F/K/A BIOSTORAGE TECHNOLOGIES, INC.)
Reel/Frame 073514/0609 →