Equipment storage for substrate processing apparatus
View Patent ↗A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.
1. A substrate processing apparatus comprising:
a housing forming a chamber adapted to hold a controlled environment;
a docking station connected to the housing and configured to accept a substrate transport container;
a substrate transport apparatus connected to the housing and operable to transport substrates between the chamber and a substrate transport container docked at the docking station;
a subframe located beneath the docking station and removably connected to the housing; and
a device mounted to the subframe and connected by at least one cable to another device, the other device being connected to the housing, where the subframe is configured to be separated from the housing without disrupting communication between an internal environment of the substrate transport container located at the docking station and an internal environment of the chamber.
2. The substrate processing apparatus of claim 1 , wherein the device mounted to the subframe is one of a power supply or a controller, and wherein the other device is connected to the housing and located inside the chamber.
3. The substrate processing apparatus of claim 1 , wherein the device mounted to the subframe is one of a power supply or a controller, and wherein the other device is connected to the housing and located outside the chamber.
4. The substrate processing apparatus of claim 1 , wherein the subframe is adapted to be separated from the housing, for access to the device.
5. The substrate processing apparatus of claim 4 , wherein the subframe and housing form an enclosure around the device when the subframe is connected to the housing.
6. The substrate processing apparatus of claim 4 wherein the subframe has a wheeled base for rolling the subframe between a connected and a separated position, relative to the housing.
7. The substrate processing apparatus of claim 6 , wherein the subframe is adapted to latch onto the housing.
8. The substrate processing apparatus of claim 7 , wherein the subframe has a module supporting rack for supporting electrical equipment in a modular arrangement.
9. The substrate processing apparatus of claim 1 wherein, when the subframe is separated from the housing, the device remains connected by the at least one cable to the other device.