Patent Assignment
Reel/Frame 044142/0258
Security Interest
Recorded: 2017-10-06
Received: 2017-10-06
Pages: 46
Assignors
BIOSTORAGE TECHNOLOGIES, INC.
Executed: 2017-10-04
BROOKS AUTOMATION, INC.
Executed: 2017-10-04
Assignee
MORGAN STANLEY SENIOR FUNDING, INC.
1300 THAMES STREET, 4TH FLOOR, THAMES STREET WHARF, BALTIMORE, MD, 21231, UNITED STATES
Covered Properties
(100)
Substrate Transport Apparatus
Application:
15/702,436 →
Compact Direct Drive Spindle
Application:
15/695,744 →
Substrate Processing Apparatus
Application:
15/693,871 →
Modular Sample Store
Application:
15/671,865 →
Tube Sealer
Application:
15/545,394 →
Automated System for Storing, Retrieving and Managing Samples
Application:
15/647,091 →
Substrate Processing Apparatus
Application:
15/634,871 →
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Application:
15/634,957 →
Multi-Refrigerator High Speed Cryopump
Application:
15/633,100 →
Sample Selector
Application:
15/496,989 →
Dual Arm Robot
Application:
15/489,449 →
High Speed Substrate Aligner Apparatus
Application:
15/465,326 →
Automated Sample Storage System Having Storage Consumable with Sub-Optimal Storage Density
Application:
15/410,606 →
Ventilation Assisted Passive Cell Freezing Device
Application:
15/397,544 →
Wafer Tray Sorter with Door Coupled to Detector
Application:
15/386,799 →
Time-Optimal Trajectories for Robotic Transfer Devices
Application:
15/376,119 →
Process Apparatus with on-the-Fly Substrate Centering
Application:
15/369,573 →
Load Lock Fast Pump Vent
Application:
15/333,021 →
Sample Tube and Method
Application:
62/405,714 →
Cryopump Hybrid Frontal Array
Application:
15/270,354 →
Substrate Transport Apparatus
Application:
15/114,275 →
Substrate Processing Apparatus
Application:
15/215,143 →
On the Fly Automatic Wafer Centering Method and Apparatus
Application:
15/209,497 →
Substrate Transport Apparatus
Application:
15/110,130 →
Processing Apparatus
Application:
15/103,268 →
Helium Management Control System
Application:
15/143,125 →
Workpiece Handling Modules
Application:
15/137,722 →
Recirculation Substrate Container Purging Systems
Application:
15/095,898 →
Cryogenic Freezer
Application:
15/085,630 →
Automated Cryogenic Storage System
Application:
15/085,431 →
Cryopump
Application:
15/012,399 →
Unequal Link Scara Arm
Application:
15/012,425 →
Substrate Processing Apparatus
Application:
14/988,256 →
Reduced Capacity Carrier, Transport, Load Port, Buffer System
Application:
14/976,952 →
Compact Direct Drive Spindle
Application:
14/941,888 →
Tool Auto-Teach Method and Apparatus
Application:
14/937,676 →
Wafer Aligner
Application:
14/928,352 →
Storage Stacks
Application:
14/875,921 →
Dual Scara Arm
Application:
14/868,689 →
Method And Apparatus For Providing Temperature Control To A Cryopump
Application:
14/852,365 →
Side Opening Unified Pod
Application:
14/822,392 →
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
Application:
14/822,310 →
Scalable Motion Control System
Application:
14/698,110 →
Semiconductor cleaner systems and methods
Application:
14/682,059 →
Sample Storage and Retrieval System
Application:
14/671,423 →
Dual Arm Robot
Application:
14/617,052 →
Test Tube Capping and De-Capping Apparatus
Application:
14/419,854 →
Stacked Process Modules for a Semiconductor Handling System
Application:
14/611,697 →
Portable Cryogenic Workstation
Application:
14/600,751 →
Substrate Processing Apparatus
Application:
14/579,067 →
Recirculation Substrate Container Purging Systems and Methods
Application:
14/569,662 →
Substrate Transport Apparatus
Application:
14/568,742 →
Reduced Capacity Carrier and Method of Use
Application:
14/541,934 →
Sealed Robot Drive
Application:
14/540,072 →
Position Feedback for Sealed Environments
Application:
14/540,058 →
Method and Apparatus for Brushless Electrical Machine Control
Application:
14/540,077 →
Sealed Switched Reluctance Motor
Application:
14/540,055 →
Integrated Systems for Interfacing with Substrate Container Storage Systems
Application:
14/537,696 →
Access Arbitration System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same
Application:
14/530,102 →
Helium Management Control System
Application:
14/523,507 →
Port Door Positioning Apparatus and Associated Methods
Application:
14/508,974 →
Volumetric Measurement
Application:
14/344,944 →
Load Port Module
Application:
14/472,678 →
Substrate Transport Apparatus
Application:
14/469,260 →
Substrate Processing Apparatus
Application:
14/377,987 →
Workpiece Structures and Apparatus for Accessing Same
Application:
14/452,490 →
Load Station
Application:
14/344,930 →
Process Apparatus with on-the-Fly Substrate Centering
Application:
14/325,702 →
Scalable Stockers with Automatic Handling Buffer
Application:
14/318,707 →
Device and Method for Removing a Peelable Seal
Application:
14/316,414 →
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
Application:
14/305,715 →
Transport Apparatus
Application:
14/365,277 →
Time-Optimal Trajectories for Robotic Transfer Devices
Application:
14/342,035 →
Semiconductor Wafer Handling and Transport
Application:
14/353,153 →
Sample Selector
Application:
14/229,077 →
Elevator-Based Tool Loading and Buffering System
Application:
14/223,553 →
Semiconductor Wafer Handling Transport
Application:
14/216,829 →
Load Lock Chamber
Application:
14/195,086 →
Substrate Processing Apparatus
Application:
14/180,876 →
Substrate Transport
Application:
14/161,039 →
Wafer Center Finding with Kalman Filter
Application:
14/159,223 →
Helium Management Control System
Application:
14/001,803 →
Substrate Transport Apparatus with Active Edge Gripper
Application:
14/148,785 →
Systems and Methods for Warming a Cryogenic Heat Exchanger Array, for Compact and Efficient Refrigeration, and for Adaptive Power Management
Application:
14/130,263 →
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Application:
14/089,439 →
Substrate Transport Apparatus
Application:
14/071,314 →
Compact Substrate Transport System
Application:
14/058,436 →
High Speed Substrate Aligner Apparatus
Application:
14/042,248 →
Semiconductor Manufacturing Systems
Application:
14/014,910 →
Cryopump
Application:
13/983,973 →
Manipulator Auto-Teach and Position Correction System
Application:
13/914,397 →
Substrate Loading and Unloading Station with Buffer
Application:
13/908,909 →
Cryopump with Controlled Hydrogen Gas Release
Application:
13/988,497 →
Gripper Apparatus and Method for Containers of Different Sizes
Application:
13/892,926 →
Linear Vacuum Robot with Z Motion and Articulated Arm
Application:
13/861,693 →
Tray Engine with Slide Attached to an End Effector Base
Application:
13/830,692 →
Volumetric Measurement
Application:
13/776,101 →
Dual Scara Arm
Application:
13/768,495 →
Substrate Processing Apparatus
Application:
13/764,373 →
Multi-Refrigerator High Speed Cryopump
Application:
13/753,093 →