Substrate transport apparatus with active edge gripper
View Patent ↗In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.
1. A substrate processing apparatus comprising:
a chamber configured to hold an isolated atmosphere;
a drive mechanism connected to the chamber;
a movable arm assembly connected to the drive mechanism and mounted within the chamber, the movable arm assembly having an end effector, the end effector includes a chuck for holding a substrate and an active edge gripper with a contact surface, where an edge of the substrate is gripped by actuating the active edge gripper to engage the substrate with the contact surface;
active edge grip automation on board the movable arm assembly, the active edge grip automation including one of
an on board motion sensor configured to sense end effector acceleration and send a signal to open and close the active edge gripper based on a predetermined acceleration of the end effector in motion, or
an on board wireless power supply; and
a controller configured to effect actuation of the active edge gripper, to open and close the active edge gripper, in response to at least one of the signal from the on board motion sensor so that actuation of the active edge gripper is effected in the motion of the end effector common to generation of the signal from the on board motion sensor and the actuation of the active edge gripper, or with actuation power transmitted from the on board wireless power supply to the active edge gripper.
2. The substrate processing apparatus of claim 1 , further comprising a wireless communication device connected to the controller, wherein the active edge grip automation is configured to open and close the active edge gripper in response to receiving a wireless signal from the wireless communication device.
3. The substrate processing apparatus of claim 2 , wherein the wireless communication device is located outside the chamber.
4. The substrate processing apparatus of claim 2 , further comprising a wireless communication device, wherein the controller is located outside the chamber and connected to the active edge grip automation through the wireless communication device.
5. The substrate processing apparatus of claim 1 , wherein power to actuate the active edge gripper is wirelessly transmitted to the active edge gripper.
6. The substrate processing apparatus of claim 1 , further comprising a transport vehicle movably mounted within the chamber, the transport vehicle having a base where the drive mechanism is connected to the base.
7. The substrate processing apparatus of claim 1 , wherein the chuck is configured to passively grip the substrate when motion of the end effector is below a predetermined level of acceleration during transport of the substrate.
8. The substrate processing apparatus of claim 1 , further comprising an adjustment device for setting a predetermined sensed acceleration that will actuate the active edge gripper.
9. A substrate processing apparatus comprising:
a chamber configured to hold an isolated atmosphere;
a drive mechanism connected to the chamber;
a movable arm assembly connected to the drive mechanism and mounted within the chamber, the movable arm assembly having an end effector, the end effector includes a chuck for holding a substrate and an active edge gripper with a contact surface, where an edge of the substrate is gripped by actuating the active edge gripper to engage the substrate with the contact surface; and
on board active edge grip closed circuit automation including edge grip actuation power and control that is self-contained and configured so that the on board active edge grip closed circuit automation is closed wholly on board the movable arm assembly and configured to independently effect stand alone, on board the movable arm assembly, control and powering up of active edge grip actuation wholly from the on board active edge grip closed circuit automation independent of a physical link to an off board device.
10. The substrate processing apparatus of claim 9 , wherein the off board device comprises a controller and the on board active edge grip automation includes an on board motion sensor configured to sense end effector acceleration and send a signal to open and close the active edge gripper based on a predetermined acceleration, the controller being configured to effect actuation of the active edge gripper, to open and close the active edge gripper, in response to the signal from the on board motion sensor.
11. The substrate processing apparatus of claim 9 , wherein the off board device comprises a controller and the on board active edge grip automation includes an on board wireless power supply, the controller being configured to effect actuation of the active edge gripper, to open and close the active edge gripper, with actuation power transmitted from the on board wireless power supply to the active edge gripper.
12. The substrate processing apparatus of claim 9 , wherein power to actuate the active edge gripper is wirelessly transmitted to the on board wireless power supply.
13. The substrate processing apparatus of claim 9 , further comprising a transport vehicle movably mounted within the chamber, the transport vehicle having a base where the drive mechanism is connected to the base.
14. The substrate processing apparatus of claim 9 , wherein the chuck is configured to passively grip the substrate when motion of the end effector is below a predetermined level of acceleration during transport of the substrate.
15. The substrate processing apparatus of claim 9 , further comprising an adjustment device for setting a predetermined sensed acceleration that will actuate the active edge gripper.
16. The substrate processing apparatus of claim 9 , wherein the on board active edge grip automation includes an accelerometer.
17. The substrate processing apparatus of claim 9 , further comprising an adjustment device for setting a predetermined force to be applied to the substrate during actuation of the active edge gripper.