Substrate transport apparatus
A substrate processing apparatus comprising a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height, at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links, and at least one torque transmission band extending longitudinally between and coupled to each of the first pulley and the second pulley, the at least one torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that the at least one torque transmission band includes a segment of laterally increased cross section for the corresponding band height.
1. A substrate processing apparatus comprising:
a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height;
at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links; and
a multiband torque transmission with more than one independent unidirectional torque transmission band each of which extends longitudinally continuously between and independently coupled to each of the first pulley and the second pulley so that each torque load transmission, between the first pulley and the second pulley, by each of the more than one independent unidirectional torque transmission band between the first pulley and the second pulley imparts, under torque load, a tension load throughout a respective one of the more than one independent unidirectional torque transmission band substantially continuously throughout a whole span length of the respective one of the more than one independent unidirectional torque transmission band extending in whole from the first pulley to the second pulley, each of the more than one independent unidirectional torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that each of the more than one independent unidirectional torque transmission band includes a segment of laterally increased cross section for the corresponding band height, the segment of laterally increased cross section being distinct from and disposed between end couplings located at a respective terminus of the respective one of the more than one independent unidirectional torque transmission band coupling opposite ends of the respective one of the more than one independent unidirectional torque transmission band respectively to each of the first pulley and the second pulley.
2. The substrate processing apparatus of claim 1 , further comprising a drive section drivingly connected to the first pulley for effecting extension and retraction of the serially connected arm links.
3. The substrate processing apparatus of claim 1 , wherein the first pulley is a drive pulley and the second pulley is a driven pulley.
4. The substrate processing apparatus of claim 1 , wherein the segment of laterally increased cross section is a non-flexing band segment.
5. The substrate processing apparatus of claim 1 , wherein the transport arm includes:
a first arm link having a proximate end coupled to a drive section;
a second arm link being rotatably coupled, at a proximate end of the second arm link, to a distal end of the first arm link; and
a substrate support connected to a distal end of the second arm link.
6. The substrate processing apparatus of claim 1 , wherein the transport arm comprises a SCARA arm.
7. The substrate processing apparatus of claim 1 , wherein each of the more than one independent unidirectional torque transmission band includes a first and second pulley interface section having a first lateral cross section different than the laterally increased cross section, and the segment of laterally increased cross section joins the first pulley interface section to the second pulley interface section.
8. The substrate processing apparatus of claim 1 , wherein each of the more than one independent unidirectional torque transmission band includes a first and second pulley interface section, and the segment of laterally increased cross section is disposed on the at least one torque transmission band between the first pulley interface section and the second pulley interface section.
9. The substrate processing apparatus of claim 1 , wherein the segment of laterally increased cross section is affixed to the respective one of the more than one independent unidirectional torque transmission band.
10. The substrate processing apparatus of claim 1 , wherein the segment of laterally increased cross section has a unitary one piece construction with the respective one of the more than one independent unidirectional torque transmission band.
11. The substrate processing apparatus of claim 1 , wherein the segment of laterally increased cross section comprises one or more flanges, with ends that define the laterally increased cross section, protruding laterally from one or more lateral sides of the respective one of the more than one independent unidirectional torque transmission band and extending longitudinally along the one or more lateral sides of the respective one of the more than one independent unidirectional torque transmission band.
12. A substrate processing apparatus comprising:
a transport arm having serially connected arm links, each of the arm links having a predetermined arm link height;
at least a first pulley and a second pulley, where the second pulley is connected to a driven arm link of the serially connected arm links; and
a multiband torque transmission with more than one independent unidirectional torque transmission band each of which extends longitudinally continuously between and independently coupled to each of the first pulley and the second pulley so that each torque load transmission, between the first pulley and the second pulley, by each of the more than one independent unidirectional torque transmission band between the first pulley and the second pulley imparts, under torque load, a uniaxial tension load throughout a respective one of the more than one independent unidirectional torque transmission band substantially continuously throughout a whole span length of the respective one of the more than one independent unidirectional torque transmission band extending in whole from the first pulley to the second pulley, each of the more than one independent unidirectional torque transmission band having a lateral band thickness and a predetermined height related to the predetermined arm link height, and a band segment coupled to at least one lateral side of the respective one of the more than one independent unidirectional torque transmission band, the band segment being configured to form a structural doubler member to change a thickness of the respective one of the more than one independent unidirectional torque transmission band over a predetermined length of the respective one of the more than one independent unidirectional torque transmission band, the doubler member being distinct from and disposed between end couplings located at a respective terminus of the respective one of the more than one independent unidirectional torque transmission band coupling opposite ends of the respective one of the more than one torque transmission band respectively to each of the first pulley and the second pulley.
13. The substrate processing apparatus of claim 12 , further comprising a drive section drivingly connected to the first pulley for effecting extension and retraction of the arm links.
14. The substrate processing apparatus of claim 12 , wherein the first pulley is a drive pulley and the second pulley is a driven pulley.
15. The substrate processing apparatus of claim 12 , wherein the band segment is a non-flexing band segment.
16. The substrate processing apparatus of claim 12 , wherein the transport arm includes:
a first arm link having a proximate end coupled to the drive section;
a second arm link being rotatably coupled, at a proximate end of the second arm link, to a distal end of the first arm link; and
a substrate support connected to a distal end of the second arm link.
17. The substrate processing apparatus of claim 12 , wherein the transport arm comprises a SCARA arm.
18. The substrate processing apparatus of claim 12 , wherein the band segment is mechanically fixed to or chemically bonded to the at least one lateral side.
19. The substrate processing apparatus of claim 12 , wherein the band segment comprises one or more flanges extending laterally from the at least one lateral side.
20. The substrate processing apparatus of claim 12 , wherein the band segment comprises a first band segment disposed on a first lateral side of the respective one of the more than one independent unidirectional torque transmission band and a second band segment disposed on a second lateral side of the respective one of the more than one independent unidirectional torque transmission band, the second lateral side being opposite the first lateral side.
21. A substrate transport apparatus comprising:
a drive section;
a SCARA arm having three or more arm links where at least one arm link has a predetermined arm link height;
at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links; and
a multiband torque transmission with more than one independent unidirectional torque transmission band each of which extends longitudinally continuously between and independently coupled to each of the first pulley and the second pulley so that each torque load transmission, between the first pulley and the second pulley, by each of the more than one independent unidirectional torque transmission band between the first pulley and the second pulley imparts, under torque load, a uniaxial tension load throughout a respective one of the more than one independent unidirectional torque transmission band substantially continuously throughout a whole span length of the respective one of the more than one independent unidirectional torque transmission band extending in whole from the first pulley to the second pulley, each of the more than one independent unidirectional torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that each of the more than one independent unidirectional torque transmission band includes a segment of laterally increased cross section for the corresponding band height, the segment of laterally increased cross section being distinct from and disposed between end couplings located at a respective terminus of the respective one of the more than one independent unidirectional torque transmission band coupling opposite ends of the respective one of the more than one torque transmission band respectively to each of the first pulley and the second pulley.
22. The substrate transport apparatus of claim 21 , wherein each of the more than one independent unidirectional torque transmission band includes a band segment disposed on at least one lateral side of the respective one of the more than one independent unidirectional torque transmission band, the band segment being configured to change the cross section of the band segment over a predetermined length of the respective one of the more than one independent unidirectional torque transmission band for the predetermined height.
23. The substrate transport apparatus of claim 22 , wherein the band segment is mechanically affixed to or chemically bonded to the at least one lateral side.
24. The substrate transport apparatus of claim 22 , wherein the band segment comprises one or more flanges extending laterally from the at least one lateral side.
25. A substrate processing apparatus comprising:
a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height;
at least a first pulley and a second pulley, where the second pulley is connected to an arm link of the serially connected arm links; and
a multiband torque transmission with more than one independent unidirectional torque transmission band each of which extends longitudinally continuously between and independently coupled to each of the first pulley and the second pulley so that each torque load transmission, between the first pulley and the second pulley, by each of the more than one independent unidirectional torque transmission band between the first pulley and the second pulley imparts, under torque load, a tension load throughout a respective one of the more than one independent unidirectional torque transmission band substantially continuously throughout a whole span length of the respective one of the more than one independent unidirectional torque transmission band extending in whole from the first pulley to the second pulley, each of the more than one independent unidirectional torque transmission band having a corresponding band height for the predetermined arm link height, a first band portion extending longitudinally between the first and second pulleys and a second band portion extending longitudinally between the first and second pulleys where a thickness of the second band portion is greater than a thickness of the first band portion, the second band portion being distinct from and disposed between end couplings located at a respective terminus of the respective one of the more than one independent unidirectional torque transmission band coupling opposite ends of the respective one of the more than one independent unidirectional torque transmission band respectively to each of the first pulley and the second pulley.