Load lock chamber
View Patent ↗A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.
1. A semiconductor processing tool comprising:
a frame forming at least one chamber with an opening and having a door sealing surface around a periphery of the opening;
more than one door configured to interact with the sealing surface for sealing the opening, each of the more than one door having lateral sides substantially perpendicular to the door sealing surface and substantially perpendicular to a transfer plane of a substrate transferred through the opening; and
at least one drive for each door, each door being independently operable and each drive being located on the frame at least partially laterally alongside of at least one of the lateral sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate transferred through the opening, and at least one of the drives having actuators located at least partially in front of the door sealing surface and the drive actuators being coupled to at least one of the sides of a respective one of the more than one door for moving the respective door to and from a sealed position;
wherein the at least one drive is located outside of a substrate transfer zone for transferring substrates into and out of the at least one chamber through the opening.
2. The semiconductor processing tool of claim 1 , wherein drive links couple the respective door to the actuators, the drive links being located in front of and substantially parallel to the door sealing surface.
3. The semiconductor processing tool of claim 1 , wherein the actuators comprise modular assemblies configured to be removably mounted on the frame.
4. The semiconductor processing tool of claim 1 , wherein the actuators comprise one or two axes of motion and are configured to move the respective door away from the door sealing surface for moving the respective door from the sealed position.
5. The semiconductor processing tool of claim 1 , wherein the more than one door is an atmospheric door or vacuum slot valve.
6. The semiconductor processing tool of claim 1 , wherein the door sealing surface is removable from the frame.
7. The semiconductor processing tool of claim 1 , further comprising a removeable insert coupled to the frame and at least one insert seal.
8. The semiconductor processing tool of claim 1 , wherein the more than one door are stacked one above the other.